The conditions for producing silicide in a si-containing titanium alloy have been studied. The microstructure of several heattreated specimens have been analyzed using EM400 TEM. The results show that the silicide produced under some conditions, and it'snucleation is heterogeneous. The silicide has hexagonal structure with the fo1lowing lattice parameters: a = 0. 767 nm, c = 0. 585 nm,c/a=0. 763. The silicide has a orientation relationship with a phase.