The adhesion property of Au/NiCr/Ta multi-layered metallic films was investigated by the indentation method, rolling contact fatigue method and scratch method with both friction and acoustic emission modes. The results indicate that the indentation method can not distinguish if the failure happens between the metallic film and substrate and there are no cracks during the indentation process; and the rolling contact fatigue method can not be used to evaluate the adhesion property for metallic films due to the plastic deformation; only the scratch method can eventually be used to distinguish the special scratch behavior for multi-layered metallic films. Additionally, the friction mode can reflect the changes on different metallic film layers, it is more sensitive than the acoustic emission in the same layer. The number of layers and the layer thickness of film and the scratch resistance of metallic films can be reflected by a critical characteristic load at a certain extent.
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唐武 邓龙江 徐可为.金属薄膜结合性能的评价方法研究[J].稀有金属材料与工程,2007,36(8):1412~1415.[Tang Wu, Deng Longjiang, Xu Kewei. Evaluation Methods on Adhesion Property of Metallic Films[J]. Rare Metal Materials and Engineering,2007,36(8):1412~1415.] DOI:[doi]