In order to study on the influence of parameters on process of warm compaction of molybdenum powder, a finite element method (FEM) model for molybdenum powder has been established using the elasto-plasticity FEM software. Warm compaction process of three-dimensional (3-D) cylinder was simulated on by FEM. The distributions of the density and the stress inside the compacts, the longitudinal and horizontal flowing of molybdenum particles were investigated by means of the simulation results. The reliability of FEM model was proved by the experiment, and the effects of the technology and material parameters on the molybdenum powder compaction were analyzed. The results show that the distributions of the relative density and the stress are very close at the top, the longitudinal section and the lateral wall of the compacts during the warm compaction.