YBCO film was deposited on LaAlO3 (LAO) single crystal substrate of Φ76.2 mm using low-fluorine sol-gel process. The uniformity of microstructure, thickness and superconducting properties of the Φ76.2 mm YBCO film were analyzed. The results show that the whole film has uniform thickness and exhibits good c-axis epitaxial growth orientation and excellent uniform superconducting properties