The microstructural evolution and the element distribution of Ti14 (α+Ti2Cu) alloy during semi-solid compression were investigated. Moreover, the Ti2Cu precipitate behaviors were discussed in detail. The results show that the microstructure, the number and distribution of Ti2Cu precipitates have significant dependence on the process parameters. More Ti2Cu will precipitate on grain boundaries at a higher deformation temperature, and/or a lower strain rate as well as deformation ratio, and finally a network structure is formed after deformation at 1100 °C. The precipitation on grain boundaries is found to be mainly controlled by peritectic reactions. The elevated temperatures resulted in more liquid along the prior grain boundaries, and a Cu-rich region is formed, finally. the “coarse” grain boundaries appear during re-solidification