Carbon sphere template with a diameter of about 150 nm was uniformly coated with Y2O3 by homogeneous precipitation templates method. The Y2O3 hollow nanospheres with a diameter of about 300 nm were obtained after the carbon sphere template was removed through calcination at a proper temperature. Infrared spectrograph (FT-IR), scanning electron microscope (SEM), transmission electron microscope (TEM), X-ray diffraction (XRD), thermogravimetry (TG) and X-ray photoelectron spectrum (XPS) were employed to characterize the morphology and structure of the Y2O3 hollow nanospheres. The results reveal that the cubic-phase Y2O3 hollow nanospheres with a diameter of 300 nm as well as the thin shell thickness about 20 nm can be prepared.