Titanium and aluminum were deposited on the SiC fiber by magnetron sputtering according to a certain power ratio. The precursor wires of SiC fibers with Ti-Al matrix were fabricated and then close-packed in the canning. The specimens of SiC fiber reinforced titanium-aluminium intermetallic compound matrix composites were prepared by hot isostatic pressing. Microstructure was observed by SEM, the effects of hot isostatic pressing and vacuum heat treatment on the interfacial layer were analyzed. The influences of magnetron sputtering power on the Ti/Al atomic ratio and variation of phase composition during titanium aluminum in-situ reaction were researched using X-ray diffraction and energy spectrum analysis. Kinetic analysis of Ti-Al reaction was conducted through differential scanning calorimetry. The results show that Ti/Al atomic ratio is directly affected by the sputtering power of Ti and Al targets. When the power of TC4 and Al targets is 13 and 4.5 kW/m2, respectively, the Al content is 27at%; when the power of TC4 and Al targets is 13 and 8.3 kW/m2, respectively, the Al content is 49at%. In addition, studies on kinetics show that Al3Ti is the priority generation phase of Ti-Al in-situ reaction. TiAl, Al2Ti and Ti3Al will be gradually formed with the diffusion of Al. However, after full diffusing of Al, the final stable reaction product depends on Ti/Al atomic ratio. When the Ti/Al atomic ratio is 1:1, TiAl can be obtained, and TiAl and Ti3Al can coexist in the region with the different Ti/Al atomic ratios.