A new precursor, bis(2,2,6,6-tetramethyl-3,5-heptanedionato)palladium was synthesized from PdCl2 and Hthd in methanol. The structure of bis(2,2,6,6-tetramethyl-3,5-heptanedionato)palladium was characterized by element analysis, infrared spectroscopy, 1HNMR spectroscopy and single crystal XRD analysis. Thermal decomposition properties were studied by thermogravimetric analysis under nitrogen atmosphere. The results show that bis(2,2,6,6-tetramethyl-3,5-heptanedionato)palladium is an ideal precursor for it is completely volatiled at 291 oC. The palladium films were prepared from the synthesized precursor by metal organic chemical vapor deposition (MOCVD) on quartz. The structure and morphology of palladium films were studied by XRD and AFM, respectively. The results indicate that the pure palladium films are successfully prepared and the surface of films is continuous and compact