For preventing hydrogen lossing from zirconium hydride, zirconium oxide films were prepared on the surface of zirconium hydride by Sol-Gel method. Zirconium n-propoxide was precursor in reaction system. The influence of heat treatment temperature on phase composition, surface morphologies, cross-sectional morphologies and hydrogen resistance performance of zirconium oxide films were researched in this paper. The phase composition, surface morphologies and cross-sectional morphologies were characterized by X-ray diffractometer(XRD) , confocal laser scanning microscope(CLSM) and scanning election microscopy(SEM), respectively. Hydrogen resistance performance was evaluated by the experiment of vacuum dehydrogenation testing. The results showed that the continuous and dense zirconium oxide films are formed on the surface of zirconium hydride when heat treatment temperature is 600℃. The PRF values of zirconium oxide films present the trend that increase at first,then decrease with increasing of heat treatment temperature. The maximum PRF value of zirconium oxide films reach 8.6 at 600℃. The phase structure of zirconium oxide films is both tetragonal phase T-ZrO1.8 and monoclinic phase M-ZrO1.8, and the films is mainly composed of monoclinic phase M-ZrO1.8.