In order to study the interdiffusion between Pd and Ti at high temperatures in a short time, the Pd coating was prepared on the surface of C.P.Ti by the magnetron sputtering technique. The Pd/Ti samples were heat-treated at 500, 550, 600 and 700 °C for 5 h. The phase composition, microstructure and element distribution of alloy layers were studied by XRD, SEM and EDS. The result shows that after the Pd/Ti sample is heat-treated at 500 °C for 5 h, a very slight interdiffusion occurs between Pd and Ti. When the temperature rises to 550 °C, a continuous diffusion layer appears between Pd coating and the substrate. As the temperature increases further, the interdiffusion becomes more and more obvious. When the temperature rises to 700 °C, TiPd3, TiPd2, Ti2Pd3, TiPd and Ti2Pd compound phases are observed on the alloyed surface layer. This paper also analyzed the Pd/Ti interface diffusion and reaction kinetics. The results indicate that increase of diffusion layer thickness experiences a process from interface reaction control to diffusion control.