The Cu-SiO2 nano-composite thin films with different Cu target powers and substrate temperatures were prepared by DC and RF magnetron sputtering in an alternating deposition method. The phase structure and optical absorption properties of Cu-SiO2 nano-composite films were studied. The results indicate that with the increase of the Cu target power, the size of the Cu nanoparticles increases, and the peak in the optical absorption spectra presents a red-shift. Due to the re-evaporation effect, the size of Cu nanoparticles decreases and the peak exhibits a blue-shift with increasing of the substrate temperature. Compared with the films deposited at RT, the films at different substrate temperatures display a clear surface plasmon resonance absorption peak in the visible band. Therefore, the Cu target power and the substrate temperature significantly influence the crystallization states and optical absorption properties of the Cu-SiO2 nano-composite films