Thermal oxidation (TO) treatments were conducted on Ti6Al4V under 973 K for 10 h, 20 h ,30 h, 40 h and 50 h,. Microstructural characteristics of the TO layers were analyzed using X-ray diffraction (XRD), glow discharge optical emission spectrometer analysis (GDOES) and scanning electron microscope (SEM). Effect of TO duration on microstructure and properties of Ti6Al4V were estimated on microhardness tester, MFT-R4000 reciprocating friction-wear testing machine and electrochemical workstation. The results showed that the obtained TO layers were uniform and continuous. TO duration had certain impacts on the formation, surface hardness, wear and corrosion resistance on TO layers. The TO layer produced at 973 K-30 h exhibited more promising characteristics indicating by thickness value, surface hardness, wear and corrosion resistance in comparison with other TO layers.