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FeCrNiMoCu高熵合金涂层的多靶磁控共溅射制备及微结构分析
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四川理工学院材料科学与工程学院,四川理工学院材料科学与工程学院,四川理工学院材料科学与工程学院,四川理工学院分析测试中心,四川理工学院材料科学与工程学院,四川理工学院材料科学与工程学院

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Preparation and Microstructure of FeCrNiMoCu high-entropy alloy coatings by magnetron co-sputtering
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Material Corrosion and Protection Key Laboratory of Sichuan Province,College of Materials Science and Engineering,Sichuan University of Science and Engineering,Material Corrosion and Protection Key Laboratory of Sichuan Province,College of Materials Science and Engineering,Sichuan University of Science and Engineering,Material Corrosion and Protection Key Laboratory of Sichuan Province,College of Materials Science and Engineering,Sichuan University of Science and Engineering,,Material Corrosion and Protection Key Laboratory of Sichuan Province,College of Materials Science and Engineering,Sichuan University of Science and Engineering,

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    摘要:

    本文采用多靶磁控共溅射技术的单靶功率可调特点,在304不锈钢基体上,制备出了FeCrNiMoCu高熵合金涂层。通过纳米压入(Nanoindentation)、X射线衍射仪(XRD)、扫描电子显微镜(SEM)、原子力显微镜(AFM)等对不同组分含量的FeCrNiMoCu高熵合金涂层的纳米硬度、微观结构及形貌进行了表征。结果表明:磁控共溅射法制备的FeCrNiMoCu涂层具有简单的FCC结构和高的纳米硬度,表面硬度随铁元素含量上升而增加。

    Abstract:

    The FeCrNiMoCu high-entropy alloy coatings were prepared in 304 stainless steel by five- targets co-sputtering. Nano-indentation hardness, microstructure and morphology of the as-deposited coating were investigated using Nano indentation, X-ray diffraction ( XRD), atom force microscopy(AFM) and scanning electron microscopy ( SEM). The obtained results indicate that the coatings have simple FCC solid solution and high hardness, and coating surface hardness increase with Fe content.

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刘春海,蒲国,颜成杰,张伟,崔学军,金永中. FeCrNiMoCu高熵合金涂层的多靶磁控共溅射制备及微结构分析[J].稀有金属材料与工程,2018,47(5):1578~1582.[LIU Chunhai, PU Guo, YAN Chengjie, ZHANG Wei, CUI Xuejun, JING Yongzhong. Preparation and Microstructure of FeCrNiMoCu high-entropy alloy coatings by magnetron co-sputtering[J]. Rare Metal Materials and Engineering,2018,47(5):1578~1582.]
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历史
  • 收稿日期:2016-04-19
  • 最后修改日期:2016-08-14
  • 录用日期:2016-10-18
  • 在线发布日期: 2018-06-08
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