Study on heating process of molybdenum particles in radio frequency plasma can provide theoretical guidelines for improving preparation process of plasma spheroidization. In this paper, the effect of coil current frequency, postion of injection probe tip and powder feeder rate on motion trajectories and heating process of molybdenum particles in plasma have been studied by using numerical simulation method. The research shows that molybdenum particles can be heated to higher temperature during the spheroidization process when coil current frequency is lower beacuase of higher plasma temperature; Chaning of injection probe tip postion have great effect on motion and heating of smaller particles; Decrease of powder feeder rate can increase the energy get from plasma, thus improving the spheroidization effect.