Silver-based alloy targets were prepared by self-designed melting-casting-stirring equipment. The influence of Au and Ge on the microstructure and property of silver-based alloy targets were studied. Our results indicated that with the addition of Au and Ge, the microstructure of silver-based alloy targets was refined, the second dendrite was shortened and the sulfidation resistance was increased; Furthermore, when the addition of Au and Ge reached 1.0 wt%, the silver-based alloy targets had best sulfidation resistance. Additionally the phenomenon of element segregation was aggravated with the increased of the addition of Au and Ge. Therefore, a few of clustering enrichment regions appeared at the grain boundaries of Ag1.5Cu0.1Y1.5Au alloy targets and the sulfidation resistance was decreased with the increased of the addition of Au and Ge.