Low-resistivity ITO nanocubes were successfully prepared in one step by the solvothermal method. The microstructure and electrical properties of ITO nanoparticles can be adjusted by changing solvents, reaction temperature and reaction time. The results show that the lowest electrical resistivity and the average size of ITO nanoparticles was 0.2 Ω×cm and 45.95 nm respectively when the reaction temperature and time were 250 ℃ and 24 h respectively with ethylene acohol as solvent. As reaction time was prolonged, the rod-like indium hydroxides were transformed to cubic In2O3 nanoparticles gradually through the dissolution-recrystallisation mechanism. During the formation of In2O3 nanocrystals, the growth rate perpendicular to (200) plane reduced, caused by the adsorption of glycol and tetramethyl ammonium ion on the surface of particles, which induced the formation of cubic-shaped ITO nanoparticles.