A prepared method of Cu-doped TiO2 nanotubes(Cu-TNT) was proposed in this paper, which combined sputtering and anodic oxidation. Scanning electron microscopy (SEM), X-ray diffraction (XRD), Transmission Electron Microscopy (TEM) and X-ray photoelectron spectroscopy (XPS) were used to study the structural and photoelectric properties of TNT. Cu-doped inhibited the growth of nanotubes, and excessive Cu-doped had a significant effect on the morphology of nanotubes. The position of Ti ion in the lattices of TiO2 nanotubes was replaced by the Cu ion., which made the (101) crystal faces a crystal lattice distortion, and the crystal plane spacings became wilder. The addition of Cu ions affected the growth orientation of the nanotubes, inhibited the growth of anatase (101) crystal plane and promoted the preferential growth of anatase (004) crystal plane. Transient photocurrent respons analysis showed that the recombination of photoelectron-hole pairs were effectively suppressed, and would improve the utilization ratio of solar light. Keywords: Cu-doped TiO2 nanotubes, anodic oxidation, sputtering