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基于深腐蚀技术的纳米银压力烧结接头微观组织研究
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1.哈尔滨理工大学 材料科学与工程学院;2.荷兰Boschman封装技术公司;3.荷兰Delft理工大学

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基金项目:

国家自然科学基金(No. 51604090),黑龙江省自然科学基金(No. E2017050),黑龙江省普通高校青年创新人才培养计划 (UNPYSCT-2015042)


Investigation of the microstructure of pressure-assisted Ag sintering layer by deep-etching method
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Affiliation:

1.School of Material Science and Engineering,Harbin University of Science and Technology;2.Boschman Technologies B.V.;3.EEMCS Faculty, Delft University of Technology

Fund Project:

National Natural Science Foundation of China (No. 51604090), Natural Science Foundation of Heilongjiang Province (No. E2017050), and University Nursing Program for Young Scholars with Creative Talents in Heilongjiang Province (UNPYSCT-2015042)

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    摘要:

    本文采用纳米银薄膜作为研究材料,在250 ℃下施加5-10MPa的烧结压力,获得低孔隙率(1.2% to 1.4%)的高质量烧结接头。随着烧结压力由5MPa增大至10MPa,接头剪切强度显著提升。借助深腐蚀技术对烧结接头及块体银的微观组织结构进行对比分析。结果表明烧结接头的深腐蚀形貌与块体银存在明显差异。烧结接头在深腐蚀条件下呈现大量微米尺度的多边形银晶粒。当烧结压力由5MPa增大至10MPa时,多边形晶粒的尺寸与晶粒间的连接面积发生明显变化。这一现象是影响纳米银压力烧结连接接头性能的主控因素。

    Abstract:

    In this study, nano silver (Ag) film was used as the bonding material. High quality bonding layers with low porosity (1.2% to 1.4%) were obtained when the sintering pressure ranged from 5 to 10 MPa at 250 ℃. As the sintering pressure increased from 5 to 10 MPa, the shear strength of the pressure-assisted sintering specimens was improved. The microstructure of the sintered layers was investigated in comparison with the bulk Ag by deep-etching method. The results revealed that the deep-etched morphology of the sintered layer was quite different from that of the bulk Ag. Micron-scale polyhedral Ag grains were observed in the deep-etched morphology of the sintered layers. The grain size and the area of the interfaces between these polyhedral Ag grains changed as the sintering pressure increased from 5 to 10 MPa. This is considered as the dominate factor in the bonding properties of the sintered layers.

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刘洋,张浩,李昭,王林根,孙凤莲,张国旗.基于深腐蚀技术的纳米银压力烧结接头微观组织研究[J].稀有金属材料与工程,2020,49(1):42~47.[Liu Yang, Zhang Hao, Li Zhao, Wang Lingen, Sun Fenglian, Zhang Guoqi. Investigation of the microstructure of pressure-assisted Ag sintering layer by deep-etching method[J]. Rare Metal Materials and Engineering,2020,49(1):42~47.]
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  • 收稿日期:2018-07-22
  • 最后修改日期:2019-12-19
  • 录用日期:2018-09-13
  • 在线发布日期: 2020-02-16
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