Using carbon, silicon carbide and silicon as raw material, the composite raw material powder was prepared by pretreatment process and C/Si 80/20at% target via hot pressing. The target material was then sputtered on different substrates. The micromorphology was analyzed by SEM; the resistivity was measured by four probes; the crystal structure was examined by XRD combined with Raman spectroscopy. The results yielded are: (1) Uniformly distributed C / Si powder of Si elements was obtained after consistent ball milling for 48 hours. While the powder is vacuum heat treated at 1900 ℃, liquid silicon and solid carbon generate equiaxed 3C-SiC through inter-diffusion. (2) Whenβ-SiC powders with different size were vacuum heat-treated at 1900 ℃, there was a significant disparity between neck growth rate and crystal structure transformation. Under high temperature, the nano-β-SiC powder had higher vapor pressure and its neck growth rate was relatively faster. Subsequently, pure 3C-SiC microparticles with higher sphericity were acquired after evaporation-coagulation and recrystallization. (3) Using C / Si / SiC 70/10/10 at% powder as raw materials and through ball milling /high-temperature vacuum heat treatment as pretreatment methods, C / Si 80/20 at% target was hot-pressed. The results show that: In comparison with the C / SiC 60/20 at% binary component system, the target prepared by the ternary component pretreatment powder has better uniformity, the average resistivity is 3.9×10-3 ohm · cm and the range is 0.59, the density is 2.34g / cm3, the degree of graphitization is 0.17, the graphite crystals have good integrity. (4) C / Si 80 / 20at% target was magnetron sputtered on glass, silicon wafer and ceramic substrate to deposit diamond-like thin films. The results exhibited that the film on the Si substrate had a longitudinal growth mode and the film particles were less than 20nm; The film layer on glass had a layered growth mode and were tightly bonded; The film on the ceramic substrate, composed of micron-sized particles that were similar to the microstructure of the ceramic matrix.