+高级检索
首页 > 过刊浏览>2021年第50卷第11期 >3917-3923. DOI:10.12442/j.issn.1002-185X.20200647
PDF HTML阅读 XML下载 导出引用 引用提醒
单层声表面波叉指换能器(SAW-IDT)结构优化设计
作者:
作者单位:

1.江苏大学 土木工程与力学学院 高端装备关键结构健康管理国际联合研究中心，江苏 镇江 212013;2.北卡罗莱纳州立大学 机械与航空航天工程系，美国 罗利 27606

基金项目:

国家自然科学基金项目（面上项目，重点项目，重大项目）


Structural Optimization Design for Single Layer Surface Acoustic Wave Interdigital Transducer (SAW-IDT)
Author:
Affiliation:

1.National Center for International Research on Structural Health Management of Critical Components, Faculty of Civil Engineering and Mechanics, Jiangsu University, Zhenjiang 212013, China;2.Department of Mechanical and Aerospace Engineering, North Carolina State University, Raleigh 27606, US

Fund Project:

National Natural Science Foundation of China (11872191, 11520101001); Postgraduate Research & Practice Innovation Program of Jiangsu Province (KYCX20_3073)

  • 摘要
    • | |
  • 访问统计
    • |
  • 参考文献 [29]
    • |
  • 相似文献 [4]
    • | | |
  • 文章评论
    摘要:

    为优化单层声表面波换能器的驱动性能，改善现有δ函数分析方法在计算过程中的不足之处，采用有限元仿真优化方法对叉指式换能器的静力学性能进行了分析，研究了支路电极宽度w、电极间距s和基片厚度t对驱动性能的影响。仿真结果表明，当w/t=0.7时，可以得到最佳应变响应；当s/t＞3.2时，可以得到最大应变。同时还得出了电极间距越小，驱动电压越低的结论。根据仿真优化结果制备了声表面波叉指换能器（SAW-IDT），并进行了频率响应测试。研究结果为声表面波叉指换能器的制备、性能测试和应用提供了指导。

    Abstract:

    In order to optimize the actuating performance of single layer surface acoustic wave interdigital transducer (SAW-IDT) and to improve the deficiencies of calculation process of the δ function analysis method, the static properties of the SAW-IDT were analyzed by the finite element simulation optimization method. The influence of the width of the branch electrodes (w), the electrodes interval (s), and the thickness of the substrate (t) on the actuating performance of SAW-IDT was investigated. The simulation results show that when w/t=0.7, the optimal strain response can be obtained; when s/t>3.2, the maximum strain can be obtained. Besides, it can also be concluded that the smaller the electrode interval, the lower the actuating voltage. According to the simulated optimization results, a SAW-IDT was prepared and the frequency response was tested by experiments. The results provide a guidance for the preparation, performance testing, and application of SAW-IDT.

    参考文献
    [1] Nguyen V H, Kaulen C, Simon U et al. Sensor[J], 2017, 17(12): 2931
    [2] Malocha D C. IEEE Ultrasonics Symposium[C]. Montreal: IEEE Press, 2004, 1: 302
    [3] Takpara R, Duquennoy M, Courtois C et al. AIP Conference Proceedings[C]. New York: AIP Publishing, 2016, 1706(1): 70 003
    [4] Yan X, Zhu R, Huang G L et al. Health Monitoring of Structural and Biological Systems 2013[C]. Bellingham: International Society for Optics and Photonics, 2013, 8695: 86 952
    [5] Zhou Q, Lam K H, Zheng H et al. Progress in Materials Science[J], 2014, 66: 87
    [6] Wang T X, Xie L Q, Xing J C et al. Integrated Ferroelectrics[J], 2017, 183(1): 8
    [7] Wang Z P, Luo Y, Zhao G Q et al. Research in Nondestructive Evaluation[J], 2016, 27(4): 204
    [8] Wang Z P, Jiang Z X, Chen L B et al. AIP Advances[J], 2018, 8(5): 55 303
    [9] Hashimoto K Y. Surface Acoustic Wave Devices in Telecommuni-cations[M]. Berlin: Springer-Verlag, 2000
    [10] Mańka M, Rosiek M, Martowicz A et al. 11th IMEKO TC 10-Workshop on Smart Diagnostics of Structures[C]. Kraków: Instrument Society of America, 2010
    [11] Mańka M. Diagnostyka[J], 2018, 19(1): 49
    [12] Wei M, Hrner A L, Zallo E et al. Phys Rev Applied[J], 2017, 9(1): 14 004
    [13] Jin J, Quek S T, Wang Q. Ultrasonics[J], 2005, 43(6): 481
    [14] Monkhouse R S C, Wilcox P W, Lowe M J S et al. Smart Materials & Structures[J], 2000, 9(3): 304
    [15] Hayward G, Hailu B, Farlow R et al. Smart Structures & Materials 2001: Smart Structures & Integrated Systems[C]. Singapore: International Society for Optics and Photonics, 2001
    [16] Ren B, Lissenden C J. AIP Conference Proceedings[J], 2016, 1706(1): 30 011
    [17] Bellan F, Bulletti A, Capineri L et al. Sensors and Actuators A[J], 2005, 123: 379
    [18] Wang Z P, Qian L, Fei Y et al. Rare Metal Materials and Engineering[J], 2020, 49(11): 3790
    [19] Lin C M, Chen Y Y, Wu T T. Journal of Physics D: Applied Physics[J], 2006, 39(3): 466
    [20] Stepinski T, Mańka M, Martowicz A et al. SPIE Smart Structures & Materials+Nondestructive Evaluation & Health Monitoring[C]. Las Vegas: SPIE, 2016, 9803: 98030N
    [21] Baravelli E, Senesi M, Ruzzene M et al. IEEE Transactions on Instrumentation & Measurement[J], 2013, 62(8): 2197
    [22] Tagawa K, Tokunaga K, Haneda H et al. IEEE 2002-28th Annual Conference of the Industrial Electronics Society[C]. Seville: IEEE Press, 2002(3): 2572
    [23] Weigel R, Kalabic F, Ostermayer G et al. IEEE Transactions on Microwave Theory & Techniques [J], 1997, 45(12): 2486
    [24] Mishra D, Singh A, Hussain D M A et al. 2016 3rd International Conference on Computing for Sustainable Global Development[C]. New Delhi: IEEE Press, 2016
    [25] Nakamura K, Hirota K. IEEE Transactions on Ultrasonics Ferroelectrics & Frequency Control[J], 1996, 43(3): 467
    [26] Kuznetsova I, Nedospasov I, Smirnov A et al. Ultrasonics[J], 2019, 99: 105 961
    [27] He J, Leser P E, Leser W P et al. Struct Health Monit[J], 2018, 17(6): 1365
    [28] Sang S, Sandgren E, Wang Z. Journal of the Acoustical Society of America[J], 2017, 142(4): 2578
    [29] Holland R. IEEE Transactions on Sonics and Ultrasonics[J], 1968, 15(2): 97
    引证文献
    网友评论
    网友评论
    分享到微博
    发 布
引用本文

王自平,费跃,钱磊,薛显,Karthik Reddy.单层声表面波叉指换能器(SAW-IDT)结构优化设计[J].稀有金属材料与工程,2021,50(11):3917~3923.[Wang Ziping, Fei Yue, Qian Lei, Xue Xian, Reddy Karthik. Structural Optimization Design for Single Layer Surface Acoustic Wave Interdigital Transducer (SAW-IDT)[J]. Rare Metal Materials and Engineering,2021,50(11):3917~3923.]
DOI：10.12442/j. issn.1002-185X.20200647

复制
文章指标
  • 点击次数:608
  • 下载次数: 1126
  • HTML阅读次数: 273
  • 引用次数: 0
历史
  • 收稿日期:2020-08-29
  • 最后修改日期:2020-11-09
  • 录用日期:2020-12-14
  • 在线发布日期: 2021-11-25
  • 出版日期: 2021-11-24

总访问量 36089289

地址：西安市未央区未央路96号 邮政编码：710016 联系电话：029－86231117

E-mail：rmme@c-nin.com; rmme0626@aliyun.com

版权所有:稀有金属材料与工程 ® 2025 版权所有 技术支持:北京勤云科技发展有限公司 ICP:陕ICP备05006818号-3