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堇青石表面化学气相沉积二氧化钛的负载机理及负载动力学
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1.西南石油大学 新能源与材料学院,四川 成都 610500;2.西南化工研究设计院 工业废气再利用国家重点实验室,四川 成都 610225

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The State Key Laboratory of Industrial Vent Gas Reuse (SKLIVGR-SWPU-2020-04)


Loading Mechanism and Loading Kinetics of TiO2 on Cordierite Surface by Chemical Vapor Deposition
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Affiliation:

1.School of New Energy and Materials, Southwest Petroleum University, Chengdu 610500, China;2.State Key Laboratory of Industrial Vent Gas Reuse, Southwest Research & Design Institute of Chemical Industry, Chengdu 610225, China

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Sponsored by State Key Laboratory of Industrial Vent Gas Reuse (SKLIVGR-SWPU-2020-04)

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    摘要:

    以酸蚀改性堇青石为基体,利用化学气相沉积法(CVD)在基体上负载TiO2,采用扫描电子显微镜、能谱仪、X射线衍射仪、BET比表面积法等对负载了TiO2的堇青石进行表征,测定不同温度下的负载速度。结果表明:负载了TiO2的堇青石主要由(211)及(200)取向的锐钛矿TiO2组成,呈八面体和立方体形态,BET比表面积达78.80 m2·g-1,平均孔径为9.80 nm,具有双峰分布特征。负载过程为TiCl4及O2向堇青石基体扩散吸附,TiCl4分解为Ti4+并在高氧势下进入基体晶格形成TiO2晶核,并经过择优取向和外延式生长,其负载沉积速率方程为,其中T为负载温度,为气相TiCl4的分压。

    Abstract:

    In order to explore the loading mechanism and loading kinetics of TiO2 on cordierite, the acid-etched cordierite was used as the matrix and the TiO2 loading test was conducted by the chemical vapor deposition (CVD) method. The scanning electron microscope, energy disperse spectroscope, X-ray diffraction, and Brunauer-Emmett-Teller (BET) specific surface area measurement were used to characterize the TiO2 on cordierite surface and determine the loading speed at different temperatures. The results show that the surface of modified cordierite with TiO2 mainly consists of (211)-oriented and (200)-oriented anatase-TiO2 which is the octahedron and cube with BET specific surface area of 78.80 m2·g-1, an average pore diameter of 9.80 nm, and a bimodal distribution. The loading process is the diffusion and adsorption of TiCl4 and O2 towards the cordierite matrix. TiCl4 decomposes and Ti4+ enters the matrix lattice under the high oxygen potential to form TiO2 nuclei. After the preferential orientation and epitaxial growth, the loading deposition rate equation is , where T is the loading temperature and is the partial pressure when TiCl4 is in the gas phase.

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杨眉,刘良文,郑珩,卢静祥,王静怡.堇青石表面化学气相沉积二氧化钛的负载机理及负载动力学[J].稀有金属材料与工程,2022,51(3):778~782.[Yang Mei, Liu Liangwen, Zheng Heng, Lu Jingxiang, Wang Jingyi. Loading Mechanism and Loading Kinetics of TiO2 on Cordierite Surface by Chemical Vapor Deposition[J]. Rare Metal Materials and Engineering,2022,51(3):778~782.]
DOI:10.12442/j. issn.1002-185X.20210062

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历史
  • 收稿日期:2021-01-21
  • 最后修改日期:2021-04-12
  • 录用日期:2021-05-12
  • 在线发布日期: 2022-03-30
  • 出版日期: 2022-03-30