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铜合金表面过渡层厚度对Cr-DLC薄膜残余应力和结合性能的影响
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1.北京金轮坤天特种机械有限公司,北京 100083;2.中国农业机械化科学研究院,北京 100083

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Influence of Cr Interlayer Thickness on Residual Stress and Adhesion of Cr-DLC Multilayer Structure Films
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1.Beijing Golden Wheel Special Machine Co., Ltd, Beijing 100083, China;2.Chinese Academy of Agricultural Mechanization Sciences, Beijing 100083, China

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    摘要:

    为提高铜合金表面Cr-DLC薄膜的膜/基结合性能,设计了Cr/CrN/Cr-DLC多层结构薄膜,采用磁控溅射/等离子辅助气相沉积方法在铜合金样品表面制备不同Cr粘结层厚度的Cr掺杂类金刚石(Cr-DLC)薄膜。利用高分辨拉曼光谱仪、薄膜应力仪、纳米压痕仪、划痕仪和连续冲击试验机分别对薄膜的微观结构、残余应力、纳米硬度和弹性模量、薄膜与基体结合性能和耐冲击韧性进行测试。结果表明,随着Cr粘结层厚度的增加,铜合金表面Cr-DLC薄膜的残余应力出现了先升高后降低的趋势,最小残余应力达到-0.47 GPa,降幅高达75.5%。薄膜的膜/基结合力随Cr粘结层厚度的增加而提高,当Cr粘结层厚度为1.01 μm时,Cr-DLC薄膜的膜/基结合力最佳,与无Cr粘结层Cr-DLC薄膜的第1(Lc1)和第2(Lc2)临界载荷相比分别提高69%和67%。经20 000次连续冲击试验,所有薄膜样品冲击坑的冲击深度均没有弹性恢复,薄膜在冲击坑的中心位置均出现一定面积的剥落,其中,Cr粘结层厚度1.01 μm的Cr-DLC薄膜样品的膜层剥落面积最小,表现出了最好的抗连续冲击的能力。一定厚度Cr粘结层能够大幅降低铜合金表面Cr-DLC薄膜的残余应力,提高膜/基结合力和耐冲击性能。

    Abstract:

    To improve the bonding strength of the chromium-doped diamond-like carbon (Cr-DLC ) films on the surface of the copper alloy, multilayer structure films of Cr/CrN/Cr-DLC with different thickness of Cr interlayer were designed and prepared on the copper alloy samples by magnetron sputtering and plasma enhanced chemical vapor deposition. The microstructure, residual stress, nanohardness, elastic modulus, bonding strength and impact toughness of the film were tested by high-resolution Raman spectrometer, film stress meter, nanoindenter, scratch tester and repetitive impact tester. The results show that the residual stress of Cr-DLC film on the surface of copper alloy decreases from -1.92 GPa to -0.47 GPa with increasing the thickness of Cr interlayer, reduced by 75.5%. When the thickness of Cr interlayer reaches 1.01 μm, the bonding strength between the Cr-DLC film and the substrate is the best, which is 69% and 67% higher than the first (Lc1) and the second (Lc2) critical loads of Cr-DLC film without Cr adhesive layer, respectively. After 20 000 times of repetitive impact tests, there is no elastic recovery in the impact depth for all Cr-DLC coated samples, and exfoliation of a certain area for the film is observed at the center of the impact pit. Among all samples, Cr-DLC coated sample with Cr interlayer of 1.01 μm in thickness has the smallest peeling area, and shows the best performance of repetitive impact resistance. Therefore, Cr interlayer with a certain thickness can significantly reduce the residual stress of the Cr-DLC film while improve the bonding strength and repetitive impact resistance.

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李振东,詹华,徐天杨,鲍曼雨,李碧晗,汪瑞军.铜合金表面过渡层厚度对Cr-DLC薄膜残余应力和结合性能的影响[J].稀有金属材料与工程,2022,51(4):1195~1202.[Li Zhendong, Zhan Hua, Xu Tianyang, Bao Manyu, Li Bihan, Wang Ruijun. Influence of Cr Interlayer Thickness on Residual Stress and Adhesion of Cr-DLC Multilayer Structure Films[J]. Rare Metal Materials and Engineering,2022,51(4):1195~1202.]
DOI:10.12442/j. issn.1002-185X.20210165

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  • 收稿日期:2021-03-02
  • 最后修改日期:2021-04-08
  • 录用日期:2021-05-13
  • 在线发布日期: 2022-04-28
  • 出版日期: 2022-04-28