The relationship between the microstructure and the creep behavior of metal films at room temperature was evaluated by nanoindentation experiment. Nanocrystalline body center-cubic (BCC) metal Mo, nanocrystalline face center-cubic (FCC) metal Ni and amorphous CuZr were selected as the study materials, and the loading rates were 0.005, 0.05, 0.1 and 0.2s-1.According to research, the creep deformation of BCC-Mo, FCC-Ni and amorphous CuZr exhibits strong loading strain rate dependence, and the main reason is related to the dominant deformation mechanism.The creep behavior of BCC-Mo is dominated by the mixed dislocation movement dominated by screw dislocation, the creep behavior of FCC-Ni is dominated by the grain boundary emission incomplete dislocation, and the creep behavior of amorphous CuZr is dominated by the shear deformation transition zone (STZ).