西安理工大学
国家自然科学基金52001251
Xi''an University of Technology
郝娟,杨超,丁郁航,张静,王旭,杜玉洲,蒋百灵.双级高功率脉冲磁控溅射N2流量对TiN镀层结构及性能的影响[J].稀有金属材料与工程,2022,51(11):4109~4116.[Hao juan, Yang chao, Ding yuhang, Zhang jing, Wang xu, Du yuzhou, Jiang bailing. Effect of N2 flow rate of Dual-stage High Power Pulsed Magnetron Sputtering on the Microstructure and Properties of TiN coatings[J]. Rare Metal Materials and Engineering,2022,51(11):4109~4116.]
DOI:10.12442/j. issn.1002-185X.20210911