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双级高功率脉冲磁控溅射N2流量对TiN镀层结构及性能的影响
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西安理工大学

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国家自然科学基金52001251


Effect of N2 flow rate of Dual-stage High Power Pulsed Magnetron Sputtering on the Microstructure and Properties of TiN coatings
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Xi''an University of Technology

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    摘要:

    研究提出一种新型的双级高功率脉冲磁控溅射技术,通过合理调配双级脉冲电场参数在不同N2流量条件下制备了TiN镀层并对其微观结构及性能进行分析。结果表明,随着N2流量由10 sccm逐渐增加至40 sccm时,TiN镀层的择优取向由(111)晶面逐渐转变为(220)晶面、表面形貌由多方向棱角的锥状结构转变为紧密结合的圆胞状结构,镀层均呈现柱状晶的生长方式且平均晶粒尺寸为纳米级,当氮气流量为20 sccm时镀层N/Ti原子比最接近标准值1,镀层组织结构最为致密且具有最优的力学性能和膜基结合性能;同时,利用新型的双级高功率脉冲磁控溅射技术可有效改善传统高功率脉冲磁控溅射平均沉积速率较低的技术缺憾,当N2流量为20 sccm时可达到46.35 nm/min。

    Abstract:

    A new dual-stage high power pulsed magnetron sputtering technology is proposed. The TiN coating was prepared by reasonably adjusting the parameters of the two-stage pulsed electric field under different N2 flow conditions, and its microstructure and performance were analyzed. The results showed that as the N2 flow rate gradually increased from 10 to 40 sccm, the preferred orientation of the TiN coating gradually changed from (111) to (220) crystal plane. The surface morphology of the coating changed from a multi-directional angular cone structure to a tightly combined round-cell structure. The coatings all present the growth mode of columnar crystals and the average crystal grain size is nanometers. When the N2 flow rate is 20sccm, the N/Ti atomic ratio of the coating is closest to the standard value of 1, and the coating structure is the densest and has the best mechanical properties and film-base bonding properties. At the same time, the use of new dual-stage high-power pulsed magnetron sputtering process can effectively improve the technical shortcomings of traditional high-power pulsed magnetron sputtering with a low average deposition rate. When the N2 flow rate is 20sccm, it can reach 46.35nm/min.

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郝娟,杨超,丁郁航,张静,王旭,杜玉洲,蒋百灵.双级高功率脉冲磁控溅射N2流量对TiN镀层结构及性能的影响[J].稀有金属材料与工程,2022,51(11):4109~4116.[Hao juan, Yang chao, Ding yuhang, Zhang jing, Wang xu, Du yuzhou, Jiang bailing. Effect of N2 flow rate of Dual-stage High Power Pulsed Magnetron Sputtering on the Microstructure and Properties of TiN coatings[J]. Rare Metal Materials and Engineering,2022,51(11):4109~4116.]
DOI:10.12442/j. issn.1002-185X.20210911

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历史
  • 收稿日期:2021-10-19
  • 最后修改日期:2021-12-23
  • 录用日期:2022-01-29
  • 在线发布日期: 2022-12-02
  • 出版日期: 2022-11-30