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微观结构与应力状态对双级HIPIMS沉积TiN镀层服役性能的影响
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1.西安理工大学材料科学与工程学院;2.嘉善鑫海精密铸件有限公司

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基金项目:

Xi"an Science and Technology Plan Project(23GXFW0055), Shaanxi Provincial Natural Science Basic Research Program Project (2024JC-YBQN-0525) and NSFC(52001251).


The Influence of Microstructure and Stress State on the Service Performance of TiN Coatings Deposited by Dual-stage HIPIMS
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Xi’an University of Technology,Xi’an

Fund Project:

Xi"an Science and Technology Plan Project(23GXFW0055), Shaanxi Provincial Natural Science Basic Research Program Project (2024JC-YBQN-0525) and NSFC(52001251).

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    摘要:

    研究利用新型双级HIPIMS技术在不同沉积时间条件下制备得到TiN镀层,分析不同镀层生长阶段其微观结构与应力状态对镀层力学、摩擦学、耐腐蚀等服役性能的影响。结果表明,随着沉积时间由30min增加至120min,TiN镀层表面结构均呈大小颗粒紧密掺杂的圆胞状结构,始终保持沉积-结晶-生长的原子堆积增厚机制;当沉积时间由90min(镀层厚度3884nm)增加至120min(镀层厚度4456nm)时,镀层应力状态出现压-拉转变。当沉积时间为90min时,TiN镀层结构致密且较小的压应力(-0.54 GPa),镀层具有较高的硬度与弹性模量(27.5 GPa、340.2 GPa)、较好的摩擦学性能(平均摩擦系数0.52,最小磨损率1.68×10-4 g/s)及耐腐蚀性能(最小腐蚀电流密度1.0632×10-8A·cm-2、最小腐蚀速率5.5226×10-5 mm·A-1)。

    Abstract:

    This study utilized a novel dual stage HIPIMS technology to prepare TiN coatings under different deposition time conditions, and analyzed the effects of microstructure and stress state at different growth stages of the coatings on the mechanical, tribological, and corrosion resistance performance of the coatings. The results showed that as the deposition time increased from 30 minutes to 120 minutes, the surface structure of TiN coating exhibited a round cell structure with tightly doped small and large particles, maintaining a deposition crystallization growth atomic stacking thickening mechanism. When the deposition time increases from 90 minutes to 120 minutes, the coating thickness increases from 3884nm to 4456 nm. The stress state of the coating undergoes a compression tension transition. When the deposition time is 90 minutes, the TiN coating structure is dense and the compressive stress is relatively small, with a compressive stress of -0.54 GPa. The coating has high hardness and elastic modulus, which are 27.5 GPa and 340.2 GPa, respectively. Meanwhile, the coating has good tribological and corrosion resistance properties, with an average friction coefficient of 0.52 and minimum wear rate of 1.68×10-4 g/s, minimum corrosion current density of 1.0632×10-8A ? cm-2, minimum corrosion rate of 5.5226×10-5 mm ?A-1.

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郝娟,王百川,丁郁航,杨超,蒋百灵,王梓毅,汪东城.微观结构与应力状态对双级HIPIMS沉积TiN镀层服役性能的影响[J].稀有金属材料与工程,,().[Hao Juan, WANG BAI CHUAN, DING YU HANG, YANG CHAO, JIANG BAI LING, WANG ZI YI, WANG DONG CHENG. The Influence of Microstructure and Stress State on the Service Performance of TiN Coatings Deposited by Dual-stage HIPIMS[J]. Rare Metal Materials and Engineering,,().]
DOI:10.12442/j. issn.1002-185X.20240043

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  • 收稿日期:2024-01-23
  • 最后修改日期:2024-02-27
  • 录用日期:2024-02-28
  • 在线发布日期: 2024-03-22
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