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TiN薄膜增强改性钛双极板耐蚀性能
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1.西安交通大学 金属材料强度国家重点实验室,陕西 西安 710049;2.西安泰金工业电化学技术有限公司,陕西 西安 710021

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基金项目:

国家重点研发计划 (2022YFB4002100)


Corrosion Resistance of Titanium Bipolar Plate Enhanced by TiN Film
Author:
Affiliation:

1.State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an 710049, China;2.Xi'an Taijin Industrial Electro-chemical Technology Co., Ltd., Xi 'an 710021, China

Fund Project:

National Key Research and Development Program of China (2022YFB4002100)

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    摘要:

    为了提高钛双极板的耐蚀性能,采用磁控反应溅射技术和脉冲沉积技术在商业纯钛TA1表面制备了氮化钛(TiN)薄膜,并对不同工艺参数下制备的薄膜进行了评价。结果表明,在不同制备工艺下TA1表面均可以形成致密完整的TiN膜,并显著提高钛基体的腐蚀电流密度。其中,磁控反应溅射所制备的薄膜成分受到氧气竞争反应的影响,其均一性低于脉冲激光沉积所制备的薄膜,脉冲激光沉积制备的薄膜在低腐蚀电流密度(0.025 μA·cm-2)、中等腐蚀过电位(–0.106 V)和良好的疏水性方面具有更优异的综合性能。

    Abstract:

    To improve the corrosion resistance of titanium (Ti) bipolar plate, titanium nitride (TiN) film was prepared on the surface of commercial TA1 pure titanium by magnetron reactive sputtering and pulse laser deposition (PLD) techniques, and the film prepared under different process parameters were evaluated. Results show that dense and complete TiN film can be obtained on TA1 surface under different preparation processes, and the corrosion current density of Ti substrate significantly increases. However, the composition of the film prepared by magnetron reactive sputtering is affected by the oxygen competition reaction, and its homogeneity is inferior to that of the film prepared by PLD. The comprehensive performance of the PLD-prepared film shows excellent characteristics in the terms of low corrosion current density (0.025 μA·cm-2), moderate corrosion overpotential (-0.106 V), and good hydrophobicity.

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邓真桢,戴正飞,伍维博,来睿思,冯庆,贾波,王琛,吕源江,马飞.TiN薄膜增强改性钛双极板耐蚀性能[J].稀有金属材料与工程,2024,53(10):2755~2765.[Deng Zhenzhen, Dai Zhengfei, Wu Weibo, Lai Ruisi, Feng Qing, Jia Bo, Wang Chen, Lv Yuanjiang, Ma Fei. Corrosion Resistance of Titanium Bipolar Plate Enhanced by TiN Film[J]. Rare Metal Materials and Engineering,2024,53(10):2755~2765.]
DOI:10.12442/j. issn.1002-185X.20240194

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  • 收稿日期:2024-04-02
  • 最后修改日期:2024-07-06
  • 录用日期:2024-07-08
  • 在线发布日期: 2024-09-27
  • 出版日期: 2024-09-27