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乙炔气体对等离子体增强化学气相沉积DLC膜力学性能的影响
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1.广州航海学院;2.聚变新能(安徽)有限公司

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the National Natural Science Foundation, China (52274296, 52071091, 52001081); The College Student Innovation and Entrepreneurship Training Program Project from Guangdong Province in 2023 (S20230125).;广东省2023年大学生创新创业训练计划项目(S20230125)


Effects of Acetylene Gas on Mechanical Properties of DLC Film Prepared by Plasma-Enhanced Chemical Vapor Deposition
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National Natural Science Foundation, China (52274296, 52071091, 52001081); The College Student Innovation and Entrepreneurship Training Program Project from Guangdong Province in 2023 (S20230125)

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    摘要:

    类金刚石薄膜具有硬度高、摩擦系数低、化学稳定性高等优点。它们已被广泛用于提高轻合金的表面硬度和耐磨性。为了提高2024铝合金的力学性能,采用等离子体增强化学气相沉积技术在2024铝合金表面沉积了一种DLC膜。通过场发射扫描电子显微镜、纳米压痕、摩擦磨损试验研究了乙炔气体对DLC膜微观结构、硬度、耐磨性和附着力的影响。结果表明,随着乙炔比例的增加,DLC膜的厚度逐渐增加。DLC膜与基体之间存在明显的过渡层。当氩气与乙炔的比例为1:3时,由于膜内sp3和sp2键含量的变化,DLC膜的硬度显著提高。同时,DLC膜的摩擦系数降低。这项工作为改善铝合金的力学性能和提高其耐久性提供了实验和理论依据。

    Abstract:

    Diamond-like carbon (DLC) films have many advantages,such as high hardness, low friction coefficient, and high chemical stability. They have been widely used for improving the surface hardness and wear resistance of light alloys. To improve the mechanical properties of 2024 aluminum alloy, a kind of DLC film was deposited on the surface of 2024 aluminum alloy by plasma-enhanced chemical vapor deposition technique.?The effects of acetylene gas on the microstructure, hardness, wear resistance and adhesion of DLC film were investigated by field emission scanning electron microscopy, nano-indentation, friction-wear test. The results indicate that the thickness of the?DLC film increased gradually with increasing the proportion of acetylene. There is an obvious transition layer between the DLC film and matrix. When the ratio of argon to acetylene is 1:3, the hardness of the DLC film was enhanced significantly because of the changes in the content of sp3 and sp2 bonds within the film. At the same time, the coefficient friction of the DLC film was reduced. This work provides an experimental and theoretical basis for improving the mechanical properties and enhancing durability of aluminum alloys.

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李彤,常毅翔,张桐,张怡,尹衍升,路金林.乙炔气体对等离子体增强化学气相沉积DLC膜力学性能的影响[J].稀有金属材料与工程,,().[Li Tong, Chang Yi Xiang, Zhang Tong, Zhang Yi, Yin Yan Sheng, Lu Jin Lin. Effects of Acetylene Gas on Mechanical Properties of DLC Film Prepared by Plasma-Enhanced Chemical Vapor Deposition[J]. Rare Metal Materials and Engineering,,().]
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  • 收稿日期:2024-10-18
  • 最后修改日期:2025-01-08
  • 录用日期:2025-01-21
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