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耐环境稳定KH570改性SiO2减反膜的制备及性能研究
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同济大学,同济大学,上海理工大学理学院,同济大学,同济大学,同济大学

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O484

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国家重点研发计划“纳米科技”重点专项(2017YFA0204600)国家自然科学基金青年基金(11304228);上海市教育发展基金会和上海市教育委员会“晨光计划”(14CG19)和中央高校基本科研业务专项资金资助


Preparation of KH570 Modified Silica Antireflective Coating with Environemtal Stability
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Shanghai Key Laboratory of Special Artificial Microstructure Materials and Technology,School of Physics Science and Engineering,Tongji University,Shanghai Key Laboratory of Special Artificial Microstructure Materials and Technology,School of Physics Science and Engineering,Tongji University,College of Science,University of Shanghai for Science and Technology,Shanghai Key Laboratory of Special Artificial Microstructure Materials and Technology,School of Physics Science and Engineering,Tongji University,Shanghai Key Laboratory of Special Artificial Microstructure Materials and Technology,School of Physics Science and Engineering,Tongji University,Shanghai Key Laboratory of Special Artificial Microstructure Materials and Technology,School of Physics Science and Engineering,Tongji University

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    摘要:

    本文利用溶胶-凝胶法,以硅烷偶联剂γ-甲基丙烯酰氧基丙基三甲氧基硅烷(KH570)为改性剂,正硅酸四乙酯(TEOS)为前驱体,无水乙醇(EtOH)为溶剂,氨水为催化剂制备改性溶胶。并通过浸渍提拉法在BK7玻璃上镀膜,获得透光性优异且耐环境稳定性良好的SiO2减反射薄膜。使用UV-Vis-NIR分光光度计、傅里叶变换红外光谱仪(FTIR)、扫描电子显微镜(SEM)、接触角测试仪等对薄膜的性能进行测试。结果表明:当TEOS与 KH570的摩尔比为5: 1时,薄膜样品的透过率最高为99.50%,置于90%RH的湿度环境中60d后,薄膜的透过率基本不变,并表现出良好的耐环境稳定性能。

    Abstract:

    The organic modified SiO2 sols were prepared by sol-gel method using γ-Methacryloxypropyl trimethoxy silane KH570 as modifier, tetraethylorthosilicate (TEOS) as precursor, and ammonia water as catalyst. Durable antireflective (AR) coatings were then deposited on the glass substrates by dip-coating method. The modified silica AR coatings were characterized by UV-Vis-NIR spectrometry, FTIR, SEM and water contact angle measurement, respectively. The results shown that the modified coating can achieve a high peak transmittance of 99.50% when the molar ratio of KH570 to TEOS was 1:5. After exposed in the humid environment with a relative humidity of 90% for 60 days, the transmittance of SiO2 coating modified by KH570 shown almost no change, which indicate that the environmental stability of the silica coating was greatly improved

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黄吉辰,王晓栋,刘源,冯建斌,曹媛媛,沈军.耐环境稳定KH570改性SiO2减反膜的制备及性能研究[J].稀有金属材料与工程,2018,47(S2):84~88.[Huang Jichen, Wang Xiaodong, Liu Yuan, Feng Jianbin, Cao Yuanyuan, Shen Jun. Preparation of KH570 Modified Silica Antireflective Coating with Environemtal Stability[J]. Rare Metal Materials and Engineering,2018,47(S2):84~88.]
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  • 收稿日期:2017-12-05
  • 最后修改日期:2018-01-31
  • 录用日期:2018-02-01
  • 在线发布日期: 2018-11-01
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