Both CrN hard coatings and CuNiIn solid lubricating films were produced on the titanium alloy substrate by the ion beam enhanced deposition (IBED) technique. The electrochemical corrosion behavior and galvanic corrosion sensitivity of the IBED films and titanium alloy in NaCl solution were studied by using electrochemical measurement methods. The oxidation resistance of the IBED films was evaluated by the elevated temperature static oxidation method. The results show that both the electrochemical corrosion resistance and the oxidation resistance of IBEDD CuNiIn film are better than those of bulk copper. IBED CuNiIn film is contact compatible with titanium alloy substrate in Cl- solution. IBED CrN film has good corrosion resistance compared with the titanium alloy in both Cl- solution and HCl + HF mixed acid solution, it can directly contact with titanium alloy in Cl- solution. The oxidation resistance of CrN film is better than that of the titanium alloy substrate.