+高级检索
具有TiN过渡层的BCN薄膜制备与力学性能
DOI:
作者:
作者单位:

安徽理工大学机械工程学院

作者简介:

通讯作者:

中图分类号:

基金项目:


Synthesis and Mechanical Properties of BCN Thin Films with TiN Interlayer
Author:
Affiliation:

School of Mechanical Engineering, Anhui University of Science and Technology

Fund Project:

NSFC (10972190); the Technological Project of Hunan Science and Technology Commission (2012GK2024); the Scientific Research Fund of Hunan Provincial Education Department (12C0376)

  • 摘要
  • |
  • 图/表
  • |
  • 访问统计
  • |
  • 参考文献
  • |
  • 相似文献
  • |
  • 引证文献
  • |
  • 资源附件
  • |
  • 文章评论
    摘要:

    用电弧增强磁控溅射(AEMS)装置在高速钢(W18Cr4V)和Si(100)基体上制备了具有TiN过渡层的BCN薄膜,用X射线衍射仪(XRD)和傅立叶红外光谱(FTIR)分析了薄膜的微观结构,用划痕仪测试了薄膜的结合力,用显微硬度计和销盘式摩擦磨损实验仪测试了薄膜的硬度和摩擦学性能。结果表明:本文条件下制备的具有TiN过渡层的BCN薄膜的硬度为23 GPa,薄膜与GCr15钢球对磨的摩擦系数为0.3, 具有TiN过渡层的BCN薄膜的结合力和摩擦学性能较BCN单层薄膜有明显提高。

    Abstract:

    The BCN thin films with TiN interlayer were deposited on HSS and silicon (100) substrates by an arc enhanced reactive magnetron sputtering (AEMS). Microstructure of the thin films was characterized by meanings of XRD and FTIR. Adhersion to the sustrate of the thin films were characterized by scrach test. Hardness and tribological behavior of the thin films were explored by microhardness indenter and pin on disc tribometer. The present result shows that micro-hardness of the BCN thin films with TiN interlayer is 23GPa. Friction coefficient of the thin films against GCr15 steel balls is about 0.3, adhersion and tribological properties of the BCN thin films with TiN interlayer are obviously better than the BCN monolayer thin films.

    参考文献
    相似文献
    引证文献
引用本文

陈向阳.具有TiN过渡层的BCN薄膜制备与力学性能[J].稀有金属材料与工程,2016,45(2):503~506.[chen xiangyang. Synthesis and Mechanical Properties of BCN Thin Films with TiN Interlayer[J]. Rare Metal Materials and Engineering,2016,45(2):503~506.]
DOI:[doi]

复制
文章指标
  • 点击次数:
  • 下载次数:
  • HTML阅读次数:
  • 引用次数:
历史
  • 收稿日期:2014-03-27
  • 最后修改日期:2014-06-26
  • 录用日期:2014-07-28
  • 在线发布日期: 2016-07-19
  • 出版日期: