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不同PVD技术沉积TiN涂层的形貌和力学性能研究
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大连理工大学材料科学与工程学院,北京航空工业制造研究所,北京航空工业制造研究所,大连理工大学

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国家“973”计划项目(2007CB613807);国家科技支撑计划项目(2007BAE07B01)


Study on the morphology and mechanical properties of TiN coatings prepared with different PVD methods
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School of Material Science and Engineering, Dalian University of Technolog,Beijing Aeronautical Manufacturing Technology Research Institute,Beijing Aeronautical Manufacturing Technology Research Institute,Dalian University of Technology

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    摘要:

    本文采用阴极弧沉积、中频磁控溅射及二者的复合技术在GCr15基底上制备了TiN涂层。通过扫描电镜、XRD谱、微米划痕测试、硬度测试以及摩擦磨损测试对涂层的组织结构和力学性能进行了表征及对比。结构表明,采用复合磁控阴极弧技术制备的TiN涂层具有较好的综合性能,如较光滑的表面、较高的结合力和硬度,故磨损率较低。

    Abstract:

    In this paper, TiN coatings are prepared on the GCr15 substrate by the cathode arc, magnetron sputtering and their composite methods. The coatings are characterized by Scanning electron microscope (SEM), XRD spectroscopy, microscratch test, friction and wear test, and the effects of different preparation methods on the structure and mechanical properties of the coatings are compared. The results show that the coating prepared by composite arc and magnetron technique possesses better comprehensive properties such as a smooth surface, high cohesion and hardness ,so wear rate is lower.

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王明娥,马国佳,刘星,董闯.不同PVD技术沉积TiN涂层的形貌和力学性能研究[J].稀有金属材料与工程,2016,45(12):3080~3084.[WangMinge, MaGuoJia, LiuXing, DongChuang. Study on the morphology and mechanical properties of TiN coatings prepared with different PVD methods[J]. Rare Metal Materials and Engineering,2016,45(12):3080~3084.]
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历史
  • 收稿日期:2014-08-19
  • 最后修改日期:2014-09-08
  • 录用日期:2014-12-03
  • 在线发布日期: 2017-02-06
  • 出版日期: