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放电等离子体烧结Cu(In0.7Ga0.3)Se2四元合金靶材 的结构和导电性研究
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昆明贵金属研究所,华中科技大学,昆明贵金属研究所,昆明贵金属研究所,昆明贵金属研究所,昆明贵金属研究所,昆明贵金属研究所,华中科技大学

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云南省院所专项(项目号20120202)


Research on the Stucture and Conductivity of Cu (In0.7Ga0.3) Se2 Target Processed by Spark Plasma Sintering (SPS)
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Kunming institute of the precious metal,Huazhong University of Science and Technology,Kunming institute of the precious metal,Kunming institute of the precious metal,Kunming institute of the precious metal,Kunming institute of the precious metal,Kunming institute of the precious metal,Huazhong University of Science and Technology

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National Natural Science Foundation of China (51171074, 51261013)

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    摘要:

    本文选用650℃条件下真空合成的Cu(In0.7Ga0.3)Se2单相合金粉末,通过放电等离子体烧结法制备了CIGS合金靶材,研究了烧结温度、保温时间以及烧结压强等工艺参数对CIGS四元合金靶材的结构与性能的影响,研究表明:烧结温度为500℃以上时,靶材为单一的Cu(In0.7Ga0.3)Se2相,随着烧结温度的升高,靶材的晶粒尺寸增大,致密度和电阻率基本呈线性升高;随着保温时间的延长,靶材晶粒尺寸随之增大,致密度和电阻率也随之升高;随着烧结压强的提高,靶材的致密度增加,而且电阻率得到下降。综上所述,烧结温度为600℃,压强为30MPa,保温时间为5min的工艺条件下,制备靶材的电阻率50Ω?cm,致密度为98%以上。

    Abstract:

    The CIGS quaternary alloy target was prepared through Spark Plasma Sintering(SPS) using Cu(In0.7Ga0.3)Se2 single-phase powder which was compounded under 650℃. The influence of sintering technological parameter ,such as sintering temperature, holding time and sintering pressure on performance of target was studied. The results showed that the target was a Cu(In0.7Ga0.3)Se2 single-phase when sintering temperature was above 500℃, and the grain size was increased , both of density and resisitivity was a linear increase with the sintering temperature increasing. The grain size, density and resistivity were also increasing with holding time. However, the density was increased, the resistivity was decreased with the sintering pressure increasing. In conclusion, the resisitivity is 50Ω?cm, density is above 98%, when sintering temperature is 600℃,sintering pressure is 30 MPa,holding time is 5mins.

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谭志龙,冯海权,张俊敏,王传军,闻明,管伟明,郭俊梅,李晨辉.放电等离子体烧结Cu(In0.7Ga0.3)Se2四元合金靶材 的结构和导电性研究[J].稀有金属材料与工程,2017,46(1):237~241.[tanzhilong, fenghaiquan, zhangjunmin, wangchuanjun, wenming, guanweiming, guojunmei, lichenhui. Research on the Stucture and Conductivity of Cu (In0.7Ga0.3) Se2 Target Processed by Spark Plasma Sintering (SPS)[J]. Rare Metal Materials and Engineering,2017,46(1):237~241.]
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  • 收稿日期:2014-10-08
  • 最后修改日期:2014-11-28
  • 录用日期:2015-01-13
  • 在线发布日期: 2017-03-16
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