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SiC颗粒表面Mo涂层的制备与分析
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国防科学技术大学航天科学与工程学院,国防科学技术大学航天科学与工程学院,国防科学技术大学航天科学与工程学院,国防科学技术大学航天科学与工程学院,国防科学技术大学航天科学与工程学院

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Preparation and analysis of molybdenum coating on the surface of silicon carbide
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College of Aerospace and Materials Engineering,National University of Defense Technology,Hunan Changsha 410073,College of Aerospace and Materials Engineering,National University of Defense Technology,Hunan Changsha 410073,College of Aerospace and Materials Engineering,National University of Defense Technology,Hunan Changsha 410073,College of Aerospace and Materials Engineering,National University of Defense Technology,Hunan Changsha 410073,College of Aerospace and Materials Engineering,National University of Defense Technology,Hunan Changsha 410073

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    摘要:

    采用磁控溅射法在碳化硅(SiC)颗粒表面成功制备了金属钼(Mo)涂层,分析了Mo涂层的成分和形貌;为了改善初始涂层成分和形貌,对镀Mo改性SiC复合粉体进行了不同工艺的结晶化热处理,重点研究了热处理对SiC颗粒表面Mo涂层形貌和成分的影响。结果表明,磁控溅射法能够在SiC颗粒表面沉积Mo涂层,随磁控溅射时间的延长,SiC颗粒表面Mo涂层的粗糙度增大,但磁控溅射后SiC颗粒表面Mo涂层为非晶态。热处理能够有效改善SiC颗粒表面Mo涂层的成分、形貌及结晶状态,在600℃——1200℃之间结晶化热处理过程中,随热处理温度的升高,SiC颗粒表面Mo涂层形貌主要经历了以下四个阶段变化:涂层初步致密化——Mo的结晶致密化——Mo涂层颗粒的聚集长大——Mo与SiC之间发生化学反应;相应的Mo原子的存在状态也经历了如下变化:非晶态的Mo原子——结晶Mo原子——二钼化碳和硅化钼。其中800℃——900℃之间为最佳热处理温度,此时Mo涂层致密均匀包覆完整。SiC表面连续均匀致密的Mo涂层,有利于改善SiC颗粒增强金属基复合材料中基体与增强体之间的界面结合并控制不利界面反应,有利于复合材料综合性能的提高,必将扩大SiC颗粒作为增强体的应用范围。

    Abstract:

    The molybdenum coating was successfully deposited on the surface of silicon carbide by magnetron sputtering method, its surface morphology and chemical composition were analyzed. In order to ameliorate the surface morphology and the state of molybdenum coating, different kinds of crystallized heat-treatment were carried out. The evolution of the surface morphology and chemical composition of the molybdenum coating were investigated in detail and the results are as follows: The molybdenum coating can be successfully deposited on the surface of silicon carbide by magnetron sputtering method, with the sputter time postponed the roughness and the thickness of the coating was enhanced, and furthermore the molybdenum on the surface was in amorphous state. During the crystallized heat-treatment process, the morphology evolution of the molybdenum coating was as follows: the primary densification phase, the compactly crystallization of molybdenum atoms, the dispersive accumulation of molybdenum coating, the reaction between molybdenum and silicon carbide. The state evolution of molybdenum atoms was as follows: amorphous molybdenum, crystalline molybdenum, molybdenum compound (Mo2C and MoSi2). And the best heat treated temperature range is about 800℃-900℃. It is believed that the uniform and compactly Mo coating will broaden the application filed of SiC particles as the reinforcement in metal matrix composites especially have advantaged in control the interfacial reaction and improve interface bonding force in metal matrix composite.

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刘猛,白书欣,李顺,赵恂,熊德赣. SiC颗粒表面Mo涂层的制备与分析[J].稀有金属材料与工程,2016,45(4):1072~1077.[Liu Meng, Bai Shuxin, Li Shun, Zhao Xun, Xiong Degan. Preparation and analysis of molybdenum coating on the surface of silicon carbide[J]. Rare Metal Materials and Engineering,2016,45(4):1072~1077.]
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  • 收稿日期:2015-05-05
  • 最后修改日期:2015-07-23
  • 录用日期:2015-10-13
  • 在线发布日期: 2016-06-01
  • 出版日期: