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C含量对电弧离子镀TiAlCxN1-x(x=0, 0.18, 0.41, 0.49, 0.69)薄膜性能的影响
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陕西省教育厅产业化中试项目资助 (2011TG24)


Effect of C Content on Properties of TiAlCxN1-x (x=0, 0.18, 0.41, 0.49, 0.69) Films Deposited by Arc Ion Plating
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    摘要:

    在GCr15轴承钢基体上, 利用多弧离子镀技术低温(175 ℃)沉积TiAlCN涂层。利用SEM、EPMA、XRD、附着力测试仪、纳米压痕仪和UMT-2 高温摩擦磨损测试仪研究薄膜性质。结果表明,涂层表面光滑平整、均匀致密且无明显孔洞。涂层表面存在一定数量的液滴颗粒,薄膜厚度约为2 μm。在涂层中,发现了晶体结构为fcc-TiN结构,薄膜的晶粒大小为10~30 nm;随着薄膜中C元素的加入,XRD谱中(Ti0.5,Al0.5)N峰出现了宽化;在TiAlN中引入C,附着力下降,随着涂层中C含量的增加,薄膜中的Al和Ti比例未发生明显变化,附着力略微增加,但硬度和弹性模量先增加后减小,摩擦系数一直减小

    Abstract:

    The composite TiAlCN films were deposited by vacuum arc ion plating on GCr15 rings at 175 oC. The properties of the films were characterized by SEM,?EPMA,?XRD,?adhesion?tester,?nano-hardness?tester and UMT-2 high temperature tribometer. The results indicate that the surface of the films is smooth and dense without any obvious pores. There are a certain number of droplets on the surface of films. The thickness of the films is about 2 μm. The fcc structure of TiN is found in the films. The grain size of the films is from 10 to 30 nm. With the addition of C element into the film, (Ti0.5,Al0.5)N peak in XRD patterns appears in width. After adding C into TiAlN, the adhesion of the films declines. However, the adhesion increases slightly along with the increase of the C content, but Al and Ti ratio does not change significantly. Besides, the hardness and elastic modulus increase first and then decreases, and the friction coefficient is always declined

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杨立军,张泽辉,李 林,张 勇. C含量对电弧离子镀TiAlCxN1-x(x=0, 0.18, 0.41, 0.49, 0.69)薄膜性能的影响[J].稀有金属材料与工程,2015,44(6):1455~1458.[Yang Lijun, Zhang Zehui, Li Lin, Zhang Yong. Effect of C Content on Properties of TiAlCxN1-x (x=0, 0.18, 0.41, 0.49, 0.69) Films Deposited by Arc Ion Plating[J]. Rare Metal Materials and Engineering,2015,44(6):1455~1458.]
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  • 收稿日期:2014-06-12
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  • 在线发布日期: 2016-01-04
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