冯军,陈美艳,童洪辉,金凡亚,但敏,许泽金,沈丽如,张桂凯.低温等离子复合技术制备氧化铝阻氚涂层的研究[J].稀有金属材料与工程,2017,46(10):2837~2841.[fengjun,chenmeiyan,tonghonghui,jinfanya,danmin,xuzejin,shenliru,zhangguikai.Preparation of Alumina Coatings as TritiumPermeation Barrier by a composite Treatment of low temperature plasma[J].Rare Metal Materials and Engineering,2017,46(10):2837~2841.]
低温等离子复合技术制备氧化铝阻氚涂层的研究
投稿时间:2016-08-02  修订日期:2016-10-07
中文关键词:  氧化铝涂层  阻氚  磁控溅射  离子注入  热处理
基金项目:国家自然科学基金项目(面上项目,重点项目,重大项目)
中文摘要:
      采用低温等离子体复合技术在不锈钢基体上制备了氧化铝阻氚涂层,先后经过磁控溅射镀铝,热处理及氧离子注入。利用XRD、SEM、EDS、AES对涂层进行了相结构、表面形貌、成分、元素分布等分析,并进行了划痕实验、抗热震性能及阻氚性能测试,结果表明:磁控溅射获得了高质量的铝涂层,热处理后形成了FeAl合金过渡层。在离子注入中,当注入剂量不变电压增加时,离子注入深度增加而氧元素分布梯度减少;当注入剂量达到8×1017 ions/cm2以上时,氧元素分布变得均匀。所获得的氧化铝涂层具有较好膜基结合力、抗热震性能及阻氚性能。经过叠加电压注入且剂量达到8×1017 ions/cm2的膜层具有最好的阻氚性能,在600oC能使不锈钢的氚渗透率降低3个数量级。
Preparation of Alumina Coatings as TritiumPermeation Barrier by a composite Treatment of low temperature plasma
英文关键词:alumina coatings  tritium permeation barrier  magnetron sputtering  O ion implantation  heat treatment
英文摘要:
      In this study, the alumina coatings as tritium permeation barrier were successfully prepared on stainless steel bulk by composite low temperature plasma method of magnetron sputtering, heat treatment and O ion implantation. The phases, surface morphologies, chemical composition and O distribution of the coatings were characterized by XRD, SEM, EDS and AES individually,and after analyzing through scratch adhesion test, thermal shock resistance test and tritium permeability test. The results show that the Al coatings deposited by magnetron sputtering is well, and Fe-Al alloys interlayer was formed after heat treatment. In O ion implantation process, the oxygen depth deepened and the oxygen density gradient decreased with higher accelerating voltage at definite doses, meanwhile it can be seen that 8×1017 ions/cm2 is the crucial dose, above which ion implantation the oxygen density was more homogeneous. After a series tests, the obtained coatings has the good performance with film-substrate cohesion, thermal shock resistance and the tritium permeation resistance, and the coatings, which were treated by superposition at 8×1017 ions/cm2doses, have the best tritium permeability resistance, and it was improved 3 orders of magnitude high than the stainless steel bulk.
作者单位E-mail
冯军 南华大学 speedfjkang@163.com 
陈美艳 核工业西南物理研究院  
童洪辉 核工业西南物理研究院  
金凡亚 核工业西南物理研究院  
但敏 核工业西南物理研究院  
许泽金 核工业西南物理研究院  
沈丽如 核工业西南物理研究院  
张桂凯 中国工程物理研究院;、中国工程物理研究院  
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