Silicon, one of the most promising high-capacity anode materials of lithium ion batteries, has high theoretical specific capacity, moderate insertion / removal potential for lithium and low reactivity with electrolyte. However, it suffers from the huge volume effect, which leads to its poor electrochemical performance. In this paper, some investigations and the preparation methods about overcoming the shortcomings of silicon based materials in recent years are reviewed, including silicon nanoparticles, silicon composites, and other related materials for lithium ion battery. The development trend and the prospect of silicon based anode materials for lithium ion batteries are also analyzed.