谢斌,刘冠鹏,李龙腾,赵延飞,杨硕,郗雨林.直流电弧等离子体法制备In(Sn)-O及Sn(In)(Sb)-O系纳米颗粒[J].稀有金属材料与工程,2018,47(7):2037~2041.[Xie Bin,Liu Guanpeng,Li Longteng,Zhao Yanfei,Yang Shuo,Xi Yulin.Synthesis of In(Sn)-O and Sn(In)(Sb)-O Systems Nanoparticles Using DC Arc Plasma Method[J].Rare Metal Materials and Engineering,2018,47(7):2037~2041.]
直流电弧等离子体法制备In(Sn)-O及Sn(In)(Sb)-O系纳米颗粒
投稿时间:2016-11-09  修订日期:2017-01-03
中文关键词:  等离子体  纳米粉体  金属氧化物  单相结构
基金项目:国家稀土稀有金属新材料研发和产业化专项资助(发改办高技(2012)1743号)
中文摘要:
      采用一种新的直流电弧等离子体法,通过对熔融的金属进行爆破(或气化),制备出了单相SnO2、In2O3纳米颗粒以及In2O3:Sn (ITO)、SnO2:Sb (ATO)和SnO2:In:Sb (IATO)多元复合纳米颗粒。XRD结果表明,所制备的SnO2和In2O3基多元复合纳米颗粒均为单相结构,没有其它杂相;TEM结果表明,直流电弧等离子体所制备的单相纳米颗粒分散性好,尺寸约20-50nm。该法合成的纳米ITO和ATO颗粒所制备的ITO靶材和SnO2电极密度高、电阻率低,表明所制备的ITO和ATO纳米颗粒可以应用于平板显示和导电电极领域。
Synthesis of In(Sn)-O and Sn(In)(Sb)-O Systems Nanoparticles Using DC Arc Plasma Method
英文关键词:plasma  nanoparticles  metal oxide  single phase
英文摘要:
      A new DC arc plasma concept to produce metal oxides nanoparticles by metal melting, blasting or gasification processes is presented. It is exemplified for the preparation of SnO2, In2O3 single phases nanoparticles and the base of SnO2, In2O3 composite nanoparticles such as In2O3:Sn (ITO), SnO2:Sb (ATO), and SnO2:In:Sb (IATO). X-ray diffraction (XRD) indicated that the doped SnO2 and In2O3 are in single phase with no other secondary phases. Transmission electron microscopy (TEM) showed the particle size ranged from 20 nm to 50 nm for the prepared single phases of nanoparticles with good dispersion. The prepared ITO and ATO nanoparticles were utilized in ITO target and ATO electrode, and their density and electrical properties were tested. The prepared ITO target and ATO electrode show high density and low resistivity and film-forming effect is good for ITO target, implying that the ITO and ATO nanoparticles prepared by DC arc plasma can be applied in the field of flat panel displays and conductive electrodes.
作者单位E-mail
谢斌 中国船舶重工集团公司第七二五研究所 bbx200999@126.com 
刘冠鹏 中国船舶重工集团公司第七二五研究所 liuguanpeng@725.com.cn 
李龙腾 中国船舶重工集团公司第七二五研究所 lilongteng@725.com.cn 
赵延飞 中国船舶重工集团公司第七二五研究所 zhaoyanfei@725.com.cn 
杨硕 中国船舶重工集团公司第七二五研究所 yangshuo@725.com.cn 
郗雨林 中国船舶重工集团公司第七二五研究所 xiyulin@725.com.cn 
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