杨晓京,赵彪,罗良.单晶锗微纳米尺度脆塑转变机理研究[J].稀有金属材料与工程,2018,47(10):3228~3232.[Yang Xiaojing,Zhao Biao,Luo liang.Research on Brittle-Ductile Transition Mechanism of Single Crystal Germanium in Micro-Nano scale[J].Rare Metal Materials and Engineering,2018,47(10):3228~3232.]
单晶锗微纳米尺度脆塑转变机理研究
投稿时间:2017-01-12  修订日期:2018-09-17
中文关键词:  单晶锗  各向异性  划痕实验  脆塑转变  临界深度
基金项目:国家自然科学基金资助(项目号51365021)
中文摘要:
      为了考察单晶锗微纳米尺度脆塑转变机理,利用纳米压痕仪分别对单晶锗(100)、(110)和(111)晶面进行纳米划痕实验,并利用原子力显微镜和扫描电子显微镜对划痕形貌进行观察。通过对划痕深度-距离曲线及划痕形貌进行分析,获取各晶面脆塑转变临界载荷和临界深度。实验结果表明:单晶锗具有强烈的各向异性,(100)、(110)和(111)晶面脆塑转变临界载荷分别为37.6 mN、30.5 mN和32.4 mN,临界深度分别为594.7 nm、512.5 nm和536.6 nm。(100)晶面因其具有最小硬度、最深脆塑转变深度,在划痕过程中塑性去除最多,脆塑转变最晚,而且随着划痕速度的增加,脆塑转变临界深度和临界载荷也相应增加。最后定载荷划痕实验验证了脆塑转变临界载荷和临界深度的正确性。
Research on Brittle-Ductile Transition Mechanism of Single Crystal Germanium in Micro-Nano scale
英文关键词:single crystal germanium  anisotropy  scrach test  brittle-ductile transition  critical depth
英文摘要:
      In order to examine the brittle-ductile transition mechanism, nano-scratch experiment was conducted on (100), (110) and (111) crystal plane by using nano-indenter, and scratch morphology was observed by using atomic force microscopy and scanning electron microscope. The critical load and critical depth of brittle-ductile transition of each crystal plane were obtained by analyzing the depth-scratch distance curve and the scratch morphology. The results showed that single crystal germanium has strong anisotropy, the critical load of brittle-ductile transition on (100), (110) and (111) crystal plane are 37.6 mN, 30.5 mN and 32.4 mN, the critical depths are 594.7 nm, 512.5 nm and 536.6 nm respectively. A most plastic remove and least brittle-ductile transition on (100) crystal plane during the process of nano-scratch is due to its minimum hardness and deepest depth of brittle-ductile transition, and with the increase of speed of scratches, critical depth and critical load of brittle-ductile transition are increased. At last, the correctness of critical load and critical depth of brittle-ductile transition was verified through constant load scratch experiments.
作者单位E-mail
杨晓京 昆明理工大学机电工程学院 xjyang@vip.sina.com 
赵彪 昆明理工大学机电工程学院 836364694@qq.com 
罗良 昆明理工大学机电工程学院  
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