乔泳彭,蒋百灵,丁郁航,张静.基于脉宽参量的TiN纳米晶薄膜制备及性能研究[J].稀有金属材料与工程,2019,47(3):916~922.[Qiao Yongpeng,Jiang Bailing,Ding Yuhang,Zhang Jing.Study on preparation and properties of TiN nanocrystalline films based on pulse width parameter[J].Rare Metal Materials and Engineering,2019,47(3):916~922.]
基于脉宽参量的TiN纳米晶薄膜制备及性能研究
投稿时间:2017-07-18  修订日期:2017-09-18
中文关键词:  脉宽参量  TiN薄膜  微观结构  力学性能
基金项目:国家自然科学基金资助(项目号52171144)
中文摘要:
      采用大功率脉冲溅射离子镀技术在不同脉宽条件下制备了一组TiN离子镀层,并通过XRD、SEM、AFM等手段对膜层的微观形貌、生长模式及相关力学性能进行了分析研究。研究结果表明:随着脉宽的增大,TiN膜层的瞬时沉积速率提高,膜层内部的晶化程度逐渐增强,薄膜晶粒尺寸有所增大,微观形貌显示为较典型的TiN(111)三角锥形以及柱状生长,颗粒尺寸及表面粗糙度均随脉宽的延长而增大,膜层整体无明显孔隙等缺陷存在。力学性能方面,通过对H/E值的分析可以看出,较小脉宽条件下制备的膜层综合性能较好、可以获得较高的膜层硬度以及较大的硬度-模量比。
Study on preparation and properties of TiN nanocrystalline films based on pulse width parameter
英文关键词:pulse width parameter  nano-crystalline TiN films  microstructure  mechanical properties
英文摘要:
      A series of TiN films were prepared by high power pulse sputtering with different pulse width parameter, and the morphology, growth pattern and mechanical properties were studied by XRD, SEM, AFM and other means of the films. The result shows that the instantaneous deposition rate of TiN films increase, the crystalline degree increases gradually, and the grain size of the films increases with the increasing of pulse width. The micro morphology shows typical triangular cone and columnar growth of TiN(111) crystal orientation. Both particle size and surface roughness increase during the increasing of pulse width. No obvious pores and significant defects exist in the films. In mechanical properties, the analysis of H\E value shows that the films have better comprehensive properties, higher coating hardness and larger Hardness modulus ratio under the condition of small pulse width.
作者单位E-mail
乔泳彭 西安理工大学材料科学与工程学院 vincoq@163.com 
蒋百灵 西安理工大学材料科学与工程学院  
丁郁航 西安理工大学材料科学与工程学院  
张静 西安理工大学材料科学与工程学院  
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