张德胜,张勤,杨洪英.Au、Ge对银基合金靶材坯料耐硫化性能的协同作用[J].稀有金属材料与工程,2019,47(3):987~993.[Zhang Desheng,Zhang Qin,Yang Hongying.Synergistic effect of Au and Ge on sulfide resistance of silver-based alloy targets[J].Rare Metal Materials and Engineering,2019,47(3):987~993.]
Au、Ge对银基合金靶材坯料耐硫化性能的协同作用
投稿时间:2017-08-01  修订日期:2017-08-18
中文关键词:  银基合金  靶材  耐硫化性    
基金项目:国家自然科学基金资助(项目号U1608254 )
中文摘要:
      采用自主设计的带有气氛保护、冒口保温、磁力搅拌和强制冷却功能高频熔炼-铸造-搅拌一体化设备制备银基合金靶材坯料。研究了Au、Ge协同作用对银基合金靶材坯料的组织和性能的影响。结果表明,随着Au、Ge添加量的增加,银基合金靶材微观组织细化,二次枝晶变短,抗硫化性提高,且在Au、Ge添加量均为1.0wt%时,银基合金靶材坯料的耐硫化性能最佳。随着Au、Ge添加量增高,元素偏析现象加剧,在Ag1.5Cu0.1Y1.5Au靶材的晶界处出现少量的富集区,使靶材的抗硫化和耐蚀性有所下降。
Synergistic effect of Au and Ge on sulfide resistance of silver-based alloy targets
英文关键词:Ag-based alloys  Sputter target  Sulfidation resistanc  Au  Ge
英文摘要:
      Silver-based alloy targets were prepared by self-designed melting-casting-stirring equipment. The influence of Au and Ge on the microstructure and property of silver-based alloy targets were studied. Our results indicated that with the addition of Au and Ge, the microstructure of silver-based alloy targets was refined, the second dendrite was shortened and the sulfidation resistance was increased; Furthermore, when the addition of Au and Ge reached 1.0 wt%, the silver-based alloy targets had best sulfidation resistance. Additionally the phenomenon of element segregation was aggravated with the increased of the addition of Au and Ge. Therefore, a few of clustering enrichment regions appeared at the grain boundaries of Ag1.5Cu0.1Y1.5Au alloy targets and the sulfidation resistance was decreased with the increased of the addition of Au and Ge.
作者单位E-mail
张德胜 东北大学 Zhangdesheng1988@126.com 
张勤 东北大学 zhangq@smm.neu.edu.cn 
杨洪英 东北大学 yanghy@smm.neu.edu.cn 
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