张姣姣,王铁钢,阎兵,刘源,姜素猛,董玉.直流基体偏压对Al-Cr-Si-N涂层结构和力学性能的影响[J].稀有金属材料与工程,2018,47(7):2232~2239.[ZHANG Jiaojiao,WANG Tiegang,YAN Bing,LIU Yuan,JIANG Sumeng,DONG Yu.Influence of DC bias voltage on Structure and Performance of theAl-Cr-Si-N Coatings Prepared by Arc Ion Plating Techniques[J].Rare Metal Materials and Engineering,2018,47(7):2232~2239.]
直流基体偏压对Al-Cr-Si-N涂层结构和力学性能的影响
投稿时间:2017-10-10  修订日期:2017-11-18
中文关键词:  Al-Cr-Si-N涂层  微观结构  显微硬度  残余应力  摩擦磨损
基金项目:国家自然科学No. 51301181;天津市应用基础与前沿技术研究计划重点项目No. 15JCZDJC39700;天津市科技特派员项目No. 16JCTPJC49500;天津市高等学校创新团队培养计划项目No. TD12-5043
中文摘要:
      采用电弧离子镀技术在不同直流偏压下沉积Al-Cr-Si-N涂层,研究基体偏压对涂层成分、微观结构和性能的影响。结果表明:Al-Cr-Si-N涂层以密排六方结构和面心立方结构的AlN相为主,随着基体负偏压增加,涂层的衍射峰整体向小角度方向偏移;涂层内残余压应力逐渐增加,最大值为-0.77GPa;涂层硬度和摩擦系数变化不明显。当基体负偏压为-40V时,Al-Cr-Si-N涂层的特征参数H/E和H3/E*2均达最大值,分别为0.1475和0.3681GPa,此时涂层具有最佳的耐磨性能,摩擦系数亦最低。
Influence of DC bias voltage on Structure and Performance of theAl-Cr-Si-N Coatings Prepared by Arc Ion Plating Techniques
英文关键词:Al-Cr-Si-N coating  microstructure  microhardness  residual stress  friction and wear
英文摘要:
      Al-Cr-Si-N coatings were deposited by arc ion plating (AIP) technique at various DC bias voltages. The effects of bias voltage on the microstructure, mechanical and wear properties of the Al-Cr-Si-N coatings were investigated. The results show that the Al-Cr-Si-N coatings is mainly composed of the hexagonal structure and the face-centered cubic structure of AlN phase. with the increase of substrate bias, the diffraction peak of the coating is shifted to the small angle. Compressive stress gradually increased, the maximum value of -0.77GPa; coating hardness and friction coefficient change is not obvious. When the negative bias of the substrate is -40V, the characteristic parameters H/E and H3/E* 2 of Al-Cr-Si-N coating are the maximum, which are 0.1475 and 0.3681GPa, respectively. At the same time, the coating had the best wear resistance and the friction coefficient was the lowest.
作者单位E-mail
张姣姣 天津职业技术师范大学 天津市高速切削与精密加工重点实验室 天津 1750137402@qq.com 
王铁钢 天津职业技术师范大学 天津市高速切削与精密加工重点实验室 天津 sytgwang@163.com 
阎兵 天津职业技术师范大学 天津市高速切削与精密加工重点实验室 天津  
刘源 天津职业技术师范大学 天津市高速切削与精密加工重点实验室 天津  
姜素猛 中国科学院金属研究所 材料表面工程研究部 沈阳  
董玉 天津职业技术师范大学 天津市高速切削与精密加工重点实验室 天津  
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