孙川希,周增林,谢元锋,夏扬.Al0.7Sb2Te3三元靶材的结构性能表征[J].稀有金属材料与工程,2019,48(7):2203~2207.[Sun Chuanxi,Zhou Zenglin,Xie Yuanfeng,Xia Yang.Structural performance characterization of Al0.7Sb2Te3 ternary target[J].Rare Metal Materials and Engineering,2019,48(7):2203~2207.]
Al0.7Sb2Te3三元靶材的结构性能表征
投稿时间:2018-01-04  修订日期:2018-03-09
中文关键词:  Al0.7Sb2Te3  XPS  化学价态  有效化合
基金项目:国家重点研发计划专项项目(2017YFB0306000)
中文摘要:
      以原子比Al:Sb:Te=0.7:2:3的混和粉为原料,采用真空合成法与烧结-热等静压制备Al0.7Sb2Te3三元靶材,通过XRD、FESEM、EDS、XPS等手段表征其性能,且重点采用XPS研究Al在Al0.7Sb2Te3三元靶材的存在状态。结果表明:Al掺杂后,靶材主相Sb2Te3的晶格常数减小,且单质Al弥散相与Al0.1Sb2Te3基体相共存,表明掺杂对靶材的组织结构确有影响;刻蚀深度从0增加至405.9nm,Al价态从以Al2O3的化合态为主逐渐过渡至以单质态为主,且Al以Al2O3形态为主的区域深度约90nm;刻蚀深度为405.9nm时,来自非氧化物的Al价态与来自AlSb的Sb价态联合表明:Al0.1Sb2Te3中的Al通过有效化合形成AlSb影响着靶材的组织结构。
Structural performance characterization of Al0.7Sb2Te3 ternary target
英文关键词:Al0.7Sb2Te3  XPS  valence  effective combination.
英文摘要:
      Al0.7Sb2Te3ternary target was prepared by vacuum synthesis and sintering-HIP method by mixed powder with atom ratios of 0.7:2:3 as raw material. Target properties was characterized by means of XRD, FESEM, EDS and XPS, and the state of Al in the ternary target was researched primarily by XPS. The results show that with Aluminum doped, main phase Sb2Te3’s lattice constant decreases, and the Aluminum dispersoids can coexist together with Al0.1Sb2Te3 matrix, which mean the existence of effect on target organization structure with Aluminum doped; with etching depth increases from 0 to 405.9nm, the main content of Aluminum’s valence is gradually transferred from the compound state of Al2O3 to simple substance state, and the area depth of Aluminum’s form dominated by Al2O3 is about 90nm; with etched by 405.9nm, the Aluminum’s valence from non-oxide and Antimony’s valence from AlSb can certify the Aluminum of Al0.1Sb2Te3 matrix influences target organization structure by forming effectively AlSb.
作者单位E-mail
孙川希 北京有色金属研究总院粉末冶金及特种材料研究所 scx_ustb@126.com 
周增林 北京有色金属研究总院粉末冶金及特种材料研究所  
谢元锋 北京有色金属研究总院粉末冶金及特种材料研究所  
夏扬 北京有色金属研究总院粉末冶金及特种材料研究所  
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