黄嘉丽,王琦琨,贺广东,雷丹,付丹扬,龚建超,任忠鸣,邓康,吴亮.PVT同质外延生长AlN单晶初期模拟及其实验研究[J].稀有金属材料与工程,2019,48(10):3209~3214.[Huang Jiali,Wang Qikun,He Guangdong,Lei Dan,Fu Danyang,Gong Jianchao,Ren Zhongming,Deng Kang,Wu Liang.Numerical Simulation and Experimental Research on AlN Crystal Initial Growth by Homoepitaxial PVT Method[J].Rare Metal Materials and Engineering,2019,48(10):3209~3214.]
PVT同质外延生长AlN单晶初期模拟及其实验研究
投稿时间:2018-06-19  修订日期:2018-08-16
中文关键词:  AlN单晶  同质外延生长  初始长晶  多相流传质  模拟仿真
基金项目:国家自然科学基金(U1560202,51401116);上海市科委基金(13DZ1108200,13521101102)
中文摘要:
      在同质外延生长大尺寸、高质量氮化铝单晶的初期,常用梯度反转工艺避免氧、碳及氢等杂质污染籽晶表面。本文使用FEMAG晶体生长模拟仿真软件及自主开发的PVT法有限元多相流传质模块对自主设计的全自动、双电阻加热气相沉积炉进行了同质外延生长AlN单晶初期温度场及传质过程模拟仿真研究,并基于模拟结果开展了同质外延长晶实验。模拟仿真及实验研究结果表明:通过生长初期的梯度反转工艺可有效消除氧、碳及氢等杂质表面污染;坩埚的合理位置对同质外延生长AlN单晶时的温度梯度、Al/N蒸气传输及生长速率等至关重要;基于AlN单晶同质外延生长初期的模拟仿真研究与成功生长实验,为下一步开展稳定同质外延扩尺寸单晶生长工艺奠定了扎实基础。
Numerical Simulation and Experimental Research on AlN Crystal Initial Growth by Homoepitaxial PVT Method
英文关键词:AlN single crystal  homoepitaxial growth  initial growth  multi-phase mass transfer  modeling and simulation
英文摘要:
      An inverse temperature gradient is generally adopted in order to avoid second nucleation at the initial homoepitaxial growth due to O, C and H impurities. In this paper, we investigated the temperature distribution and mass transfer at the initial homoepitaxial AlN growth stage in a proprietary and fully automatic physical vapor transport sublimation reactor by FEMAG and an in-house finite element multi-phase mass transfer code, respectively. Homoepitaxial growth experiment was also conducted successfully based on numerical simulation results. The simulation and experiment results showed the deposition of O, C and H impurities at the initial homoepitaxial growth stage could be efficient avoided by an inverse temperature distribution. The crucible position played a key role on the temperature distribution and mass transfer during the subsequent AlN crystal growth stage. The numerical simulation results and successful homoepitaxial growth experiment placed a solid foundation for our future size enlargement growth experiments.
作者单位E-mail
黄嘉丽 上海大学 jialihuang1994@163.com 
王琦琨 上海大学  
贺广东 上海大学  
雷丹 上海大学  
付丹扬 上海大学  
龚建超 上海大学  
任忠鸣 上海大学  
邓康 上海大学  
吴亮 上海大学  
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