The mechanical behavior and the fatigue property of Ti films with different thickness were investigated by nanoindentation test. The fatigue property of the films was quantitatively calculated according to the changes of storage stiffness under the nanoscale dynamic mechanical analysis. The results showed that the fatigue life of the films depends on the residual stress remarkably. In situ scanning images showed the thin film was significantly stacked and layered, and long cracks radiated from the center of the indenter perpendicular to the indenter edge. Additionally, there was a sizable pile up around the indentions which demonstrated that a highly localized plastic deformation and stress release occurred in the process of the nanoscale dynamic loading process. The existence of the internal compressive residual stress will offset part of the load stress to improve the fatigue life of films.