欧伊翔,庞盼,罗军,廖斌,雷明凯,欧阳晓平.深振荡磁控溅射复合沉积CrN/TiN超晶格涂层的摩擦学性能[J].稀有金属材料与工程,2020,49(7):2476~2479.[Ou Yixiang,Pang Pan,Luo Jun,Liao Bin,Lei Mingkai,Ouyang Xiaoping.Tribological properties of CrN/TiN superlattice coatings deposited by deep oscillation magnetron sputtering[J].Rare Metal Materials and Engineering,2020,49(7):2476~2479.]
深振荡磁控溅射复合沉积CrN/TiN超晶格涂层的摩擦学性能
投稿时间:2019-06-20  修订日期:2019-09-16
中文关键词:  深振荡磁控溅射  CrN/TiN超晶格涂层  结合力  磨损
基金项目:国家自然科学基金项目(面上项目,重点项目,重大项目)(U1865206),国家科技攻关计划(2017- VII-0012-0107),国防科技重点实验室基金 (614220207011802),广东省重点领域研发计划 (2019B090909002)
中文摘要:
      本文研究了IN 718高温合金、WC-6%Co硬质合金和Si(100) 基体上深振荡磁控溅射复合沉积CrN/TiN超晶格涂层的摩擦学性能。研究表明,涂层的生长对基体的类型没有选择性。随着基体的硬度升高,划痕结合力失效临界载荷增大,涂层结合力失效机制由翘曲失效转变为基体/涂层协同变形,未发现涂层的剥落失效。载荷为2 N时,磨损机制由磨粒磨损和氧化磨损转变为轻微磨粒磨损。载荷为4 N时,IN718基体上涂层的磨损机制为严重的氧化磨损,WC-6%Co基体上的涂层的磨损机制为磨粒磨损和氧化磨损,氧化物的产生、堆积和转移导致摩擦系数的波动。
Tribological properties of CrN/TiN superlattice coatings deposited by deep oscillation magnetron sputtering
英文关键词:Deep oscillation magnetron sputtering  CrN/TiN superlattice coatings  Adhesion  Wear
英文摘要:
      ). In this work, tribological properties of CrN/TiN superlattice coatings deposited on IN 718, WC-6%Co and Si(100) by the combined deep oscillation magnetron sputtering was investigated. Results show that the coating growth was independent of the nature of substrate materials. As the hardness of substrate materials was increased, the scratch critical loads increased. Adhesion failure mode changed from buckling failure to cooperative deformation of substrate/coating system with only small cracks in the whole scratch track. Wear mechanism of the coatings deposited on IN 718 and WC-6%Co changed from abrasive wear and oxidative to mild abrasive wear at a normal load of 2 N. Under normal load of 4 N, the coatings on IN 718 suffered serve oxidative wear, while the coatings on WC-6%Co suffered the combined abrasive and oxidative wear. The production, accumulation and mass transfer of oxides resulted in the oscillation of friction coefficient during dry sliding wear tests.
作者单位E-mail
欧伊翔 北京市辐射中心 yxou2016@sina.com 
庞盼 北京市辐射中心  
罗军 北京市辐射中心  
廖斌 北京师范大学  
雷明凯 大连理工大学  
欧阳晓平 西北核物理研究所  
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