王美涵,陈昀,王冠杰,雷浩,孙立贤,徐芬,张钧.纳米柱状多孔WO3- x /TiO2 薄膜的电致变色性能[J].稀有金属材料与工程,2022,51(8):2732~2738.[wangmeihan,chenyun,wangguanjie,leihao,sunlixian,xufen,zhangjun.Electrochromic Properties of Nano-columnar Porous WO3- x /TiO2 Thin Films[J].Rare Metal Materials and Engineering,2022,51(8):2732~2738.]
纳米柱状多孔WO3- x /TiO2 薄膜的电致变色性能
投稿时间:2021-07-12  修订日期:2021-09-23
中文关键词:  WO3- x /TiO2薄膜  纳米柱状  掠射角  磁控溅射  电致变色性能
基金项目:国家自然科学基金(批准号:51302175 ).辽宁省自然科学基金(批准号:2019-ZD-0540). 广西信息材料重点实验室(桂林电子科技大学)(批准号:191007-K)
中文摘要:
      采用反应磁控溅射在掠射角度α=0°和α=80°的条件下制备氧化钨(WO3-x)薄膜,然后在其表面沉积二氧化钛(TiO2)。利用X射线衍射仪(XRD)、场发射扫描电镜(FE-SEM)和X射线光电子能谱仪(XPS)对WO3-x/TiO2薄膜的晶体结构、表面/断面形貌以及表面化学成分进行表征。在三电极体系1 mol/L LiClO4/PC溶液中,采用电化学工作站和紫外-可见分光光度计测试了WO3-x/TiO2薄膜的电致变色性能。XRD结果表明,WO3-x/TiO2薄膜为非晶态结构,与掠射角度无关。当掠射角度为80°时,获得了纳米柱状多孔薄膜。从 W 4f和Ti 2p的XPS谱图确认氧化钨为亚化学计量比的WO3-x,而氧化钛为满足化学计量比的TiO2。与致密薄膜相比,纳米柱状多孔薄膜需要较低的驱动电压且具有较快的响应速度。纳米柱状多孔薄膜的电荷容量为83.78 mC,是致密薄膜电荷容量30.83 mC的2倍以上。在±1.2 V驱动电压下,注入和脱出离子扩散速率分别为Din=5.69×10-10 cm2/s和Dde= 5.08×10-10 cm2/s。与纯WO3薄膜相比,WO3-x/TiO2薄膜的电致变色循环稳定性更好。纳米柱状多孔薄膜在可见光范围内具有较大的光调制幅度,因此其光密度变化(ΔOD)大于致密薄膜。
Electrochromic Properties of Nano-columnar Porous WO3- x /TiO2 Thin Films
英文关键词:WO3- x /TiO2 thin films  nano-columnar  glancing angle  magnetron sputtering  electrochromic properties
英文摘要:
      Tungsten oxide (WO3-x) thin films were fabricated by reactive magnetron sputtering at glancing angle α=0° or α=80°, and then titanium oxide (TiO2) was deposited on it. X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM) and X-ray photoelectron spectroscopy (XPS) were employed to characterize the crystal structure, surface/cross-section morphologies, and surface chemical composition of the WO3-x/TiO2 thin films. Electrochromic properties of the WO3-x/TiO2 thin films were measured by electrochemical workstation in three-electrode system with 1 mol/L LiClO4/PC solution and UV-Vis spectrophotometer. Results reveal that the WO3-x/TiO2 thin films present totally amorphous structure independent on glancing angles. As the glancing angle is kept at 80°, the nano-columnar porous thin film is obtained. Substoichiometric tungsten oxide (WO3-x) and stoichiometric titanium oxide (TiO2) are confirmed by XPS spectra of W 4f and Ti 2p, respectively. Compared with the dense thin film, the nano-columnar porous film needs a lower driving potential and presents faster response. The charge capacity of the nano-columnar porous film is calculated to be 83.78 mC, which is over twice higher than 30.83 mC of the dense film. The intercalation and deintercalation ion diffusion rates are determined to be Din=5.69×10-10 cm2·s-1 and Dde=5.08×10-10 cm2·s-1 at the applied potential ±1.2 V, respectively. The electrochromic cycle of the nano-columnar porous WO3-x/TiO2 thin film is more stable than that of pure WO3 thin film. The optical density varying (ΔOD) of the nano-columnar porous thin film is larger than that of the dense thin film due to the larger optical modulation amplitude in the whole visible wavelengths.
作者单位E-mail
王美涵 沈阳大学 mhwang@syu.edu.cn 
陈昀 沈阳大学  
王冠杰 沈阳大学  
雷浩 铝谷产业技术研究院  
孙立贤 桂林电子科技大学  
徐芬 桂林电子科技大学  
张钧 沈阳大学  
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