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磁控溅射沉积银薄膜/涂层的研究进展
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昆明贵金属研究所稀贵金属综合利用新技术国家重点实验室

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基金项目:

云南省国际合作计划项目(2014IA037)、云南省创新团队项目(2019HC024)。云南省科技厅科研院所技术开发研究专项 (2018DC004)


Research progress of silver films / coatings deposited by magnetron sputtering
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State Key Laboratory of Advanced Technology for Comprehensive Utilization of Rare Metals,Kunming Institute of Precious Metals

Fund Project:

International Cooperation Program of Yunnan Province (2014IA037), Innovation Team Program of Yunnan Province (2019HC024), Technology Development Research Special Project of Scientific Research Institutes of Yunnan Science and Technology Department (2018DC004)

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    摘要:

    银薄膜/涂层是一种在高新技术领域极具潜力的新材料,近年来在现代工业中得到了广泛的应用。采用磁控溅射制备的银薄膜/涂层具有优异的附着力,通过选择相应的沉积参数可以实现对银薄膜/涂层微观结构及性能的调控。本文综述了磁控溅射沉积银薄膜/涂层的主要制备工艺,评述了银薄膜/涂层在其主要应用领域内的研究进展,并对其未来的发展进行了展望。

    Abstract:

    Silver films / coatings is a kind of new material with great potential in the field of high and new technology, and has been extensively used in modern industry in recent years.SThe silver thin films/coatings prepared by magnetron sputtering have excellent adhesion. The microstructure and properties adjustment of silver thin films/coatings can be achieved by selecting appropriate deposition parameters.SIn this paper, the main preparation methods of silver thin films/coatings deposited by magnetron sputtering are summarized the research progress of silver thin films/coatings in its main application fields is reviewed, and the future development of silver thin films is prospected.

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宁哲达,王一晴,陈天天,谭志龙,闻明.磁控溅射沉积银薄膜/涂层的研究进展[J].稀有金属材料与工程,2022,51(12):4773~4782.[Ning Zheda, Wang Yiqing, Chen Tiantian, Tan Zhilong, Wen Ming. Research progress of silver films / coatings deposited by magnetron sputtering[J]. Rare Metal Materials and Engineering,2022,51(12):4773~4782.]
DOI:10.12442/j. issn.1002-185X.20220297

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历史
  • 收稿日期:2022-04-11
  • 最后修改日期:2022-06-15
  • 录用日期:2022-07-12
  • 在线发布日期: 2023-01-19
  • 出版日期: 2022-12-30