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溅射功率对La-Ti/WS2 复合薄膜高温摩擦学行为的影响
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1.河南科技大学 机电工程学院,河南 洛阳 471003;2.龙门实验室,河南 洛阳 471003;3.河南科技大学 机械设计及传动系统重点实验室,河南 洛阳 471003;4.洛阳轴承研究所有限公司,河南 洛阳 471039;5.航空精密轴承国家重点实验室,河南 洛阳 471039

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国家重点基础研究发展计划(973计划)


Effect of Sputtering Power on High Temperature Tribolo-gical Behavior of La-Ti/WS2 Composite Films
Author:
Affiliation:

1.School of Mechatronics Engineering, Henan University of Science and Technology, Luoyang 471003, China;2.Longmen Laboratory, Luoyang 471003, China;3.Henan Key Laboratory for Machinery Design and Transmission System, Henan University of Science and Technology, Luoyang 471003, China;4.Luoyang Bearing Research Institute Co., Ltd, Luoyang 471039, China;5.State Key Laboratory of Aviation Precision Bearings, Luoyang 471039, China

Fund Project:

National Key Research and Development Program of China (2021YFB3400401); Science and Technology Research Project of Henan Province (202102210073)

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    摘要:

    高温条件下WS2易于氧化生成WO3,导致WS2固体润滑薄膜的摩擦学性能受到较大影响。为改善WS2固体润滑薄膜在高温条件下的摩擦学性能,采用非平衡磁控溅射技术制备了共掺杂La-Ti/WS2复合薄膜,研究了靶功率对磁控溅射La-Ti/WS2复合薄膜结构和高温摩擦学性能的影响。利用扫描电镜(SEM)、X射线衍射仪(XRD)、纳米压痕仪和X射线光电子能谱仪(XPS)分析了薄膜微观形貌、成分、力学性能、微观结构。利用高温摩擦磨损试验机研究了复合薄膜的高温摩擦学性能。结果表明,高温环境下,靶功率为20 W时La-Ti/WS2复合薄膜表现出优异的摩擦学性能。此时,复合薄膜H/E值最大,摩擦系数最小,平均为0.012,磨损率最低为1.56×10-8 mm3/N·m,这主要归因于高温下摩擦界面产生的稀土氧化物,促使La-Ti/WS2复合薄膜的摩擦磨损机制发生了改变,使得WS2在高温受破坏的情况下仍然具有优异的摩擦学性能,从而进一步拓展了WS2复合薄膜的工程应用范围。

    Abstract:

    Under high temperature conditions, the crystal WS2 is easily oxidized to WO3, which has a great impact on the tribological properties of WS2 solid lubrication films. In order to improve the tribological properties of WS2 solid lubricating films at high temperatures, the co-doped La-Ti/WS2 composite films were prepared by unbalanced magnetron sputtering. The effects of target power on the structure and tribological properties of La-Ti/WS2 composite films were studied. The micromorphology, composition, mechanical properties and microstructure of the films were analyzed by scanning electron microscopy (SEM), X-ray diffraction (XRD), nano indentation and X-ray photoelectron spectroscopy (XPS). The high temperature tribological properties of composite films were researched by high temperature friction tester. The results show that La-Ti/WS2 composite films show excellent tribological properties when the target power is 20 W at high temperature. At this time, the H/E value of the composite film is the largest, the friction coefficient is the smallest with the average value of 0.012, and the wear rate is the lowest, which is 1.56×10-8 mm3/N·m. This is mainly due to the production of rare earth oxides at the friction interface at high temperatures, which change the friction and wear mechanism of La-Ti/WS2 composite film, so that WS2 still has excellent tribological properties when it is damaged at high temperature, further expanding the scope of engineering application of WS2 composite films.

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蔡海潮,薛玉君,叶军,王景华,庞碧涛,李航.溅射功率对La-Ti/WS2 复合薄膜高温摩擦学行为的影响[J].稀有金属材料与工程,2023,52(4):1201~1209.[Cai Haichao, Xue Yujun, Ye Jun, Wang Jinghua, Pang Bitao, Li Hang. Effect of Sputtering Power on High Temperature Tribolo-gical Behavior of La-Ti/WS2 Composite Films[J]. Rare Metal Materials and Engineering,2023,52(4):1201~1209.]
DOI:10.12442/j. issn.1002-185X.20220595

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  • 收稿日期:2022-07-17
  • 最后修改日期:2022-11-09
  • 录用日期:2022-11-24
  • 在线发布日期: 2023-04-28
  • 出版日期: 2023-04-25