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Ti掺杂Ta2O5高透光涂层抗冲蚀性能及损伤演变研究
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1.河南科技大学 机电工程学院,河南 洛阳 471003;2.河南省机械设计及传动系统重点实验室,河南 洛阳 471003;3.合肥工业大学 机械工程学院,安徽 合肥 230009

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National Key R&D Program of China (2021YFB3400401)


Study on erosion resistance and damage evolution of Ti-doped Ta2O5 high transmittance coatings
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Affiliation:

1.School of Mechatronics Engineering, Henan University of Science and Technology, Luoyang 471003, China;2.Henan Key Laboratory for Machinery Design and Transmission System, Luoyang 471003, China;3.School of Mechanical Engineering, Hefei University of Technology, Hefei 230009, China

Fund Project:

National Key R&D Program of China (2021YFB3400401)

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    摘要:

    为了验证Ti掺杂Ta2O5涂层(TTO)的耐磨特性和抗冲蚀性能,采用磁控溅射技术通过控制Ti靶功率制备了一系列TTO涂层。主要研究了TTO涂层随Ti靶功率的生长结构、组织形貌、摩擦学特性。进一步研究了冲蚀试验后,TTO涂层在不同冲蚀条件下,冲蚀损伤行为随力学特性的变化规律。结果表明,TTO涂层在生长过程中由于吸附原子的迁移率消除了材料中的粗糙度、空隙和缺陷, 获得了平整致密的光滑表面。摩擦学试验表明,TTO涂层主要表现为塑性变形和微裂纹的磨损机制。较高的Ti靶功率可以提升TTO涂层的耐磨性。冲蚀试验结果表明,冲击坑、犁沟、微切削、脆性剥落和裂纹的形成为TTO涂层样品在冲蚀作用下的主要磨损机制。

    Abstract:

    In order to verify the wear resistance and erosion resistance of Ti-doped Ta2O5 coating (TTO), a series of TTO coatings were prepared by magnetron sputtering technology by controlling the power of Ti target. The growth structure, microstructure and tribological properties of TTO coatings with Ti target power were studied. After the erosion test, the variation of erosion damage behavior of TTO coatings with mechanical properties under different erosion conditions was further studied. The results show that the TTO coatings eliminates the roughness, voids and defects in the material due to the mobility of the adsorbed atoms during the growth process, and a flat and dense smooth surface is obtained. Tribological tests show that the TTO coatings is mainly characterized by plastic deformation and micro-crack wear mechanism. Higher Ti target power can improve the wear resistance of TTO coatings. The results of the erosion test show that the impact crater, furrow, micro-cutting, brittle spalling and crack formation are the main wear mechanisms of the TTO coatings samples under erosion.

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叶博瑞,晁 瑞. Ti掺杂Ta2O5高透光涂层抗冲蚀性能及损伤演变研究[J].稀有金属材料与工程,,().[Ye Borui, Chao Rui. Study on erosion resistance and damage evolution of Ti-doped Ta2O5 high transmittance coatings[J]. Rare Metal Materials and Engineering,,().]
DOI:10.12442/j. issn.1002-185X.20240563

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  • 收稿日期:2024-08-29
  • 最后修改日期:2025-05-28
  • 录用日期:2024-11-18
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