Thermal fatigue behavior under various cyclic heat loading is an important concern for tungsten as armor material in fusion devices. It may be significantly affected by its surface morphology. To address this issue, surface morphology controlled experiments have been performed on polycrystalline tungsten using an ECR plasma system and cyclic heat loading tests have been conducted upon the polished and modified samples using an electron beam facility. The results indicate that the surface topography has little effect on the characteristics of damage caused by the cycle plastic deformation during the cyclic heat loading. The micro-cracks and extrusions are formed in some grains after suffered 300 cyclic heat loading, which are aligned in different directions for varying grains. In addition, the modified specimens have fabricated both different triangular pyramid and homogeneous nanostructures by dry etching with different conditions. In this work, the cross-sectional surface of damage regions were analyzed and a set of schematic diagram was presented to explain the mechanism for the formation of micro-cracks and extrusions under cyclic heat loading.